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<p style="margin-top:0;margin-bottom:0">Hi Christian,</p>
<p style="margin-top:0;margin-bottom:0">Can you confirm age of RIE? At idle the PLC is the thing that kicks out the most heat. There's no other idle heat load i can think of and 1.5kw does seem a lot.</p>
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<p style="margin-top:0;margin-bottom:0">regards</p>
<p style="margin-top:0;margin-bottom:0">Mike</p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Christian Pfluegl <pfluegl@pendar.tech><br>
<b>Sent:</b> 01 March 2019 15:01:04<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] heat load of MA6 mask aligner and Oxford RIE 80</font>
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<p class="x_MsoNormal">Dear colleagues,</p>
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<p class="x_MsoNormal">We are planning to setup a Karl Suess MA6 maskaligner and a small Oxford RIE 80 in our facility.</p>
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<p class="x_MsoNormal">Does anyone know what the heat loads of those systems are (both idling and operating)?</p>
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<p class="x_MsoNormal">The Oxford manual says 1.5kW when idling but I am not sure how they arrive at such a high value when the RF is off.</p>
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<p class="x_MsoNormal">Thanks,</p>
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<p class="x_MsoNormal">Christian</p>
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<p class="x_MsoNormal">Dr. Christian Pfluegl</p>
<p class="x_MsoNormal">Pendar Technologies LLC</p>
<p class="x_MsoNormal">tel.: (857) 413-9339</p>
<p class="x_MsoNormal">www.pendartechnologies.com</p>
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