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</style></div><div>Hello Labnetwork community, </div><div>I've been ask by a company to etch Gorilla Glass in our DRIE-ICP etcher (Oxford Plasmalab 100), where we already etch Si (regular Bosch process) and SiO2 etching (Fused silica only). As the supplier of the Gorilla glass does not share the composition of this kind of glass, I'm a little bit afraid of cross contamination (Potassium and other material that can be present in the glass) that can be found during Si etching for example.</div><div>Is there anyone who has experienced etching this material? If yes, what is your cleaning procedure after etching Gorilla glass?</div><div><br data-mce-bogus="1"></div><div>Thank you in advance for your answer</div><div>Best</div><div>Christophe</div><div><br></div><div data-marker="__SIG_PRE__">
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<p class="MsoNormal"><b><i><span style="font-size:12.0pt;font-family:"Arial","sans-serif";
color:#1F497D">Christophe Clément</span></i></b><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial","sans-serif";
color:gray">Technicien laboratoire</span></b><span lang="EN-US" style="mso-ansi-language:
EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Laboratoire de microfabrication (LMF)</span><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca" target="_blank">www.gcmlab.ca</a></u></span><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Ecole Polytechnique de Montréal </span><a href="http://www.polymtl.ca/" target="_blank"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">www.polymtl.ca</span></a><span lang="EN-US" style="mso-ansi-language:
EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Département de génie physique </span><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D">*</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">2900 Boulevard Edouard Monpetit</span><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
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</span><span style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">8</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#333333"> </span><a href="mailto:christophe.clement@polymtl.ca" target="_blank"><span style="font-size:8.0pt;
font-family:"Arial","sans-serif";color:blue">christophe.clement@polymtl.ca</span></a><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D">(</span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">514 340 4711</span><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";
color:gray">Fax : 514 340 4711 # 2417 </span><span lang="EN-US" style="mso-ansi-language:EN-US"></span></p>
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