<div dir="ltr"><div>Hi Christophe,</div>To check for the composition, you can use an SEM with EDX/EDS. If sodium and potassium X-contamination is not a problem, and the glass is mainly Al2O3-SiO2, you could use preexisting etch recipes or a mixture of them (e.g. CHF3/Ar in 4:1) . <div><br></div><div>Bests,</div><div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div>Adrián Cavazos Sepúlveda<br><br></div><div><br></div><div><div style="color:rgb(80,0,80);font-size:12.8px"><br><hr></div><font face="Arial" size="1" style="color:rgb(80,0,80)">This message and its contents, including attachments are intended solely for the original recipient. If you are not the intended recipient or have received this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email.</font><br><br></div><br></div></div></div></div></div></div></div></div></div></div></div></div></div><br></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">Am Do., 7. März 2019 um 18:49 Uhr schrieb Christophe Clément <<a href="mailto:christophe.clement@polymtl.ca">christophe.clement@polymtl.ca</a>>:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div><div style="font-family:Arial;font-size:10pt;color:rgb(51,102,102)"><div></div><div>Hello Labnetwork community, </div><div>I've been ask by a company to etch Gorilla Glass in our DRIE-ICP etcher (Oxford Plasmalab 100), where we already etch Si (regular Bosch process) and SiO2 etching (Fused silica only). As the supplier of the Gorilla glass does not share the composition of this kind of glass, I'm a little bit afraid of cross contamination (Potassium and other material that can be present in the glass) that can be found during Si etching for example.</div><div>Is there anyone who has experienced etching this material? If yes, what is your cleaning procedure after etching Gorilla glass?</div><div><br></div><div>Thank you in advance for your answer</div><div>Best</div><div>Christophe</div><div><br></div><div>
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<p class="MsoNormal"><b><i><span style="font-size:12pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">Christophe Clément</span></i></b><span lang="EN-US"></span></p>
<p class="MsoNormal"><b><span style="font-size:10pt;font-family:Arial,sans-serif;color:gray">Technicien laboratoire</span></b><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Laboratoire de microfabrication (LMF)</span><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca" target="_blank">www.gcmlab.ca</a></u></span><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Ecole Polytechnique de Montréal </span><a href="http://www.polymtl.ca/" target="_blank"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">www.polymtl.ca</span></a><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Département de génie physique </span><span lang="EN-US"></span></p>
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