<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
In addition, relative humidity is critical in photolithography, many photoresists require re-hydration after soft bake and before exposure. Low humidity will cause patterning problems (been there, done that).</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div id="signature">
<div id="divtagdefaultwrapper" dir="ltr" style="font-size:12pt; color:rgb(0,0,0); background-color:rgb(255,255,255); font-family:Calibri,Arial,Helvetica,sans-serif,EmojiFont,"Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols">
<div name="divtagdefaultwrapper" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:; margin:0">
Kind Regards,
<div><br>
</div>
<div>Matthias Pleil, Ph.D.</div>
<div>Research Professor & Lecturer III of Mech. Eng - UNM</div>
<div>UNM MTTC Cleanroom Manager</div>
<div>PI - Southwest Center for Microsystems Education, Support Center for Microsystems Education</div>
<div>scme-nm.org, scme-support.org</div>
<div>(505)272-7157</div>
</div>
</div>
</div>
<div id="appendonsend"></div>
<hr style="display:inline-block;width:98%" tabindex="-1">
<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Paolini, Steven <spaolini@cns.fas.harvard.edu><br>
<b>Sent:</b> Wednesday, March 6, 2019 3:21 PM<br>
<b>To:</b> Xin (Shane) Guo; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Universal standards of microfab enviornment</font>
<div> </div>
</div>
<style>
<!--
@font-face
{font-family:"Cambria Math"}
@font-face
{font-family:Calibri}
p.x_MsoNormal, li.x_MsoNormal, div.x_MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif}
a:link, span.x_MsoHyperlink
{color:blue;
text-decoration:underline}
a:visited, span.x_MsoHyperlinkFollowed
{color:purple;
text-decoration:underline}
p.x_msonormal0, li.x_msonormal0, div.x_msonormal0
{margin-right:0in;
margin-left:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif}
span.x_EmailStyle18
{font-family:"Calibri",sans-serif;
color:windowtext}
.x_MsoChpDefault
{font-size:10.0pt}
@page WordSection1
{margin:1.0in 1.0in 1.0in 1.0in}
div.x_WordSection1
{}
-->
</style>
<div lang="EN-US" link="blue" vlink="purple">
<div class="x_WordSection1">
<p class="x_MsoNormal">Shane,</p>
<p class="x_MsoNormal"> The most often referenced material is from SEMI standards. Semistandards.org</p>
<p class="x_MsoNormal">Whatever criteria you adopt, please note that it is of the utmost importance to ensure consistency. If temperature and RH vary, it will introduce unwanted variables in sensitive and complex processes. Another important point is to keep
the RH relatively high (48%) to reduce ESD. If the RH and temperature fluctuate, you will encounter variation in your photo speed.</p>
<p class="x_MsoNormal">Hope this helps.</p>
<p class="x_MsoNormal">Steve</p>
<p class="x_MsoNormal"> </p>
<div>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Steve Paolini</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">11 Oxford St.</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">617- 496- 9816</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">spaolini@cns.fas.harvard.edu</span></p>
<p class="x_MsoNormal"><span style="font-size:14.0pt">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt"></span></p>
</div>
<p class="x_MsoNormal"> </p>
<div>
<div style="border:none; border-top:solid #E1E1E1 1.0pt; padding:3.0pt 0in 0in 0in">
<p class="x_MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Xin (Shane) Guo<br>
<b>Sent:</b> Wednesday, March 06, 2019 1:30 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Universal standards of microfab enviornment</p>
</div>
</div>
<p class="x_MsoNormal"> </p>
<div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New"">Hi Colleagues,<br clear="all">
</span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New""> </span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New"">Is there a universal standard for microfabrication cleanroom, outlining the requirement of humidity, temperature, noise, etc?</span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New""> </span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New"">Any documentation available?</span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New""> </span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New"">Cheers</span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New""> </span></p>
</div>
<div>
<p class="x_MsoNormal"><span style="font-size:12.0pt; font-family:"Courier New"">Shane</span></p>
</div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<table class="x_MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="470" style="width:352.5pt; border-collapse:collapse">
<tbody>
<tr>
<td style="padding:0in 0in 0in 0in"></td>
</tr>
</tbody>
</table>
<p class="x_MsoNormal"> </p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</body>
</html>