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Hi Steven,</div>
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That's great information!</div>
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I think a RH of 45% and temperature of 20+/-2oC will work for most of our applications.</div>
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Cheers</div>
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Shane</div>
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<div dir="ltr" class="gmail_attr">On Wed, Mar 6, 2019 at 5:21 PM Paolini, Steven <<a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a>> wrote:<br>
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<p class="MsoNormal">Shane,<u></u><u></u></p>
<p class="MsoNormal"> The most often referenced material is from SEMI standards. Semistandards.org<u></u><u></u></p>
<p class="MsoNormal">Whatever criteria you adopt, please note that it is of the utmost importance to ensure consistency. If temperature and RH vary, it will introduce unwanted variables in sensitive and complex processes. Another important point is to keep
the RH relatively high (48%) to reduce ESD. If the RH and temperature fluctuate, you will encounter variation in your photo speed.<u></u><u></u></p>
<p class="MsoNormal">Hope this helps.<u></u><u></u></p>
<p class="MsoNormal">Steve<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal"><span style="font-size:14pt">Steve Paolini<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">Principal Equipment Engineer<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">Harvard University Center for Nanoscale Systems<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">11 Oxford St.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">Cambridge, MA 02138<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">617- 496- 9816<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt"><a href="mailto:spaolini@cns.fas.harvard.edu" target="_blank">spaolini@cns.fas.harvard.edu</a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt"><a href="http://www.cns.fas.harvard.edu" target="_blank">www.cns.fas.harvard.edu</a></span><span style="font-size:14pt"><u></u><u></u></span></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">
labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Xin (Shane) Guo<br>
<b>Sent:</b> Wednesday, March 06, 2019 1:30 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Universal standards of microfab enviornment<u></u><u></u></p>
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<p class="MsoNormal"><span style="font-size:12pt;font-family:"Courier New"">Hi Colleagues,<br clear="all">
<u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-size:12pt;font-family:"Courier New"">Is there a universal standard for microfabrication cleanroom, outlining the requirement of humidity, temperature, noise, etc?<u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-size:12pt;font-family:"Courier New"">Any documentation available?<u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-size:12pt;font-family:"Courier New"">Cheers<u></u><u></u></span></p>
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<p class="MsoNormal"><span style="font-size:12pt;font-family:"Courier New"">Shane<u></u><u></u></span></p>
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<td style="padding:0px"><span style="font-size:1.2em;color:rgb(9,134,182)"><i>Shane GUO, PhD</i></span><span> <b>Facility Manager</b></span></td>
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<div><b>SPaRC Microfabrication Laboratory</b></div>
<div>York University | Bergeron Centre for Engineering Excellence | <span style="background-color:transparent;font-size:11.7px">Office: BRG037</span></div>
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<td style="padding:0px"><font color="#3d85c6">a:</font> <span style="font-size:11.7px">4700 Keele St., 11 Arboretum Ln., Toronto, ON, Canada M3J 1P3</span><span style="color:rgb(9,134,182)"><br>
p: </span><span><a href="tel:+1+416-736-2100x44160" style="background-color:transparent;color:rgb(0,0,1)" target="_blank">+1 416-736-2100x44160</a></span></td>
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<td style="padding:0px"><span style="color:rgb(9,134,182)">e: </span><span><a href="mailto:sguo18@yorku.ca" target="_blank">sguo18@yorku.ca</a></span></td>
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