<div dir="ltr"><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000">Hello Mengdi, </div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000">You can avoid the heating step. For this Silicon polymer, film quality degrades even with low-temperature baking. </div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000">Also, the solvent (MIBK) evaporates quite easily. </div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000">Nevertheless, I have seen that the thickness of the film gets added up, with multiple coating. </div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000">Hope this helps!!!</div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000"><br></div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000">Regards,</div><div class="gmail_default" style="font-family:arial,helvetica,sans-serif;color:#000000">Sangeeth</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Sat, Mar 9, 2019 at 7:11 PM Zhao, Mengdi <<a href="mailto:mengdiz2@illinois.edu">mengdiz2@illinois.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">




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Hello everyone,</p>
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<span style="margin:0px;font-size:12pt;font-family:"times new roman",serif;color:rgb(33,33,33);background-color:rgb(255,255,255)">I am trying to spin 350nm HSQ by double coating XR1541 6% at 2000rpm and bake at 80C between coating. However, HSQ thickness
 measured by reflectance spectrum actually get thinner after the second spin and bake. I wonder if the HSQ still get dissolved again during the 2nd dispense even with 80C bake for 4min after the first coating. Any suggestion on getting over 200nm HSQ spin coated
 on Si?</span></p>
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<span style="margin:0px;font-size:12pt;font-family:"times new roman",serif;color:rgb(33,33,33);background-color:rgb(255,255,255)">Best regards,</span></p>
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<span style="margin:0px;font-size:12pt;font-family:"times new roman",serif;color:rgb(33,33,33);background-color:rgb(255,255,255)">Mengdi</span></p>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><span style="font-family:monospace,monospace"><span style="color:rgb(0,0,0)">Sangeeth Kallatt<br>Department of Electrical Communication Engineering<br>Indian Institute of Science<br>Bangalore-12</span></span></div></div></div>