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    <p>Multiple-spins seldom produce good results. It's easier to use a
      thicker solution of HSQ. Of course you can buy thicker HSQ, such
      as Fox-16, but if you are in a hurry you can thicken the 6% HSQ
      (well, any resist really) by bubbling nitrogen through it. Just
      put a tube in the bottle and blow in some dry nitrogen. The
      solvent will evaporate, and the bubbles will keep the solution
      agitated, so a skin does not form on the surface. No need to be
      precise about the solution. Just keep bubbling until you get the
      thickness you want.<br>
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      ------------------------------------
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        <br>
        Michael Rooks
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        <br>
        Yale Institute for Nanoscience and Quantum Engineering
        <br>
        nano.yale.edu
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    <div class="moz-cite-prefix">On 3/8/2019 10:02 PM, Zhao, Mengdi
      wrote:<br>
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    <blockquote type="cite"
cite="mid:DM6PR11MB34039BA5857324942DEFDE77FF4E0@DM6PR11MB3403.namprd11.prod.outlook.com">
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          Hello everyone,</p>
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          font-family:"Times New Roman",serif;
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          <span style="margin:0px; font-size:12pt;
            font-family:"times new roman",serif;
            color:rgb(33,33,33); background-color:rgb(255,255,255)">I am
            trying to spin 350nm HSQ by double coating XR1541 6% at
            2000rpm and bake at 80C between coating. However, HSQ
            thickness measured by reflectance spectrum actually get
            thinner after the second spin and bake. I wonder if the HSQ
            still get dissolved again during the 2nd dispense even with
            80C bake for 4min after the first coating. Any suggestion on
            getting over 200nm HSQ spin coated on Si?</span></p>
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          <span style="margin:0px; font-size:12pt;
            font-family:"times new roman",serif;
            color:rgb(33,33,33); background-color:rgb(255,255,255)"><br>
          </span></p>
        <p style="margin-top: 0px; margin-bottom:
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          <span style="margin:0px; font-size:12pt;
            font-family:"times new roman",serif;
            color:rgb(33,33,33); background-color:rgb(255,255,255)">Best
            regards,</span></p>
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            font-family:"times new roman",serif;
            color:rgb(33,33,33); background-color:rgb(255,255,255)"><br>
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          <span style="margin:0px; font-size:12pt;
            font-family:"times new roman",serif;
            color:rgb(33,33,33); background-color:rgb(255,255,255)">Mengdi</span></p>
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