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<p>Multiple-spins seldom produce good results. It's easier to use a
thicker solution of HSQ. Of course you can buy thicker HSQ, such
as Fox-16, but if you are in a hurry you can thicken the 6% HSQ
(well, any resist really) by bubbling nitrogen through it. Just
put a tube in the bottle and blow in some dry nitrogen. The
solvent will evaporate, and the bubbles will keep the solution
agitated, so a skin does not form on the surface. No need to be
precise about the solution. Just keep bubbling until you get the
thickness you want.<br>
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<br>
Michael Rooks
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<br>
Yale Institute for Nanoscience and Quantum Engineering
<br>
nano.yale.edu
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<div class="moz-cite-prefix">On 3/8/2019 10:02 PM, Zhao, Mengdi
wrote:<br>
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<blockquote type="cite"
cite="mid:DM6PR11MB34039BA5857324942DEFDE77FF4E0@DM6PR11MB3403.namprd11.prod.outlook.com">
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Hello everyone,</p>
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font-family:"Times New Roman",serif;
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<span style="margin:0px; font-size:12pt;
font-family:"times new roman",serif;
color:rgb(33,33,33); background-color:rgb(255,255,255)">I am
trying to spin 350nm HSQ by double coating XR1541 6% at
2000rpm and bake at 80C between coating. However, HSQ
thickness measured by reflectance spectrum actually get
thinner after the second spin and bake. I wonder if the HSQ
still get dissolved again during the 2nd dispense even with
80C bake for 4min after the first coating. Any suggestion on
getting over 200nm HSQ spin coated on Si?</span></p>
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0px;color:rgb(33,33,33); font-size:12pt;
font-family:"Times New Roman",serif;
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<span style="margin:0px; font-size:12pt;
font-family:"times new roman",serif;
color:rgb(33,33,33); background-color:rgb(255,255,255)"><br>
</span></p>
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<span style="margin:0px; font-size:12pt;
font-family:"times new roman",serif;
color:rgb(33,33,33); background-color:rgb(255,255,255)">Best
regards,</span></p>
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font-family:"Times New Roman",serif;
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<span style="margin:0px; font-size:12pt;
font-family:"times new roman",serif;
color:rgb(33,33,33); background-color:rgb(255,255,255)"><br>
</span></p>
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<span style="margin:0px; font-size:12pt;
font-family:"times new roman",serif;
color:rgb(33,33,33); background-color:rgb(255,255,255)">Mengdi</span></p>
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