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Hi Michael,</div>
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<span style="color: rgb(0, 0, 0); font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;">That sounds like an easy way to get a thicker HSQ solution. We will definitely give it a try. Thank you!</span><br>
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Best regards,</div>
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Mengdi</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Michael Rooks <michael.rooks@yale.edu><br>
<b>Sent:</b> Saturday, March 9, 2019 7:50 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?</font>
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<p>Multiple-spins seldom produce good results. It's easier to use a thicker solution of HSQ. Of course you can buy thicker HSQ, such as Fox-16, but if you are in a hurry you can thicken the 6% HSQ (well, any resist really) by bubbling nitrogen through it. Just
put a tube in the bottle and blow in some dry nitrogen. The solvent will evaporate, and the bubbles will keep the solution agitated, so a skin does not form on the surface. No need to be precise about the solution. Just keep bubbling until you get the thickness
you want.<br>
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<br>
Michael Rooks </font><font size="-2"><br>
Yale Institute for Nanoscience and Quantum Engineering <br>
nano.yale.edu </font><br>
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<div class="x_moz-cite-prefix">On 3/8/2019 10:02 PM, Zhao, Mengdi wrote:<br>
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Hello everyone,</p>
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<span style="margin:0px; font-size:12pt; font-family:"times new roman",serif; color:rgb(33,33,33); background-color:rgb(255,255,255)">I am trying to spin 350nm HSQ by double coating XR1541 6% at 2000rpm and bake at 80C between coating. However, HSQ thickness
measured by reflectance spectrum actually get thinner after the second spin and bake. I wonder if the HSQ still get dissolved again during the 2nd dispense even with 80C bake for 4min after the first coating. Any suggestion on getting over 200nm HSQ spin coated
on Si?</span></p>
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<span style="margin:0px; font-size:12pt; font-family:"times new roman",serif; color:rgb(33,33,33); background-color:rgb(255,255,255)">Best regards,</span></p>
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<span style="margin:0px; font-size:12pt; font-family:"times new roman",serif; color:rgb(33,33,33); background-color:rgb(255,255,255)"><br>
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<span style="margin:0px; font-size:12pt; font-family:"times new roman",serif; color:rgb(33,33,33); background-color:rgb(255,255,255)">Mengdi</span></p>
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