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Hi Kurt,
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<div class="">I will let you know the results of the new seals… In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning.</div>
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<div class="">Mark<br class="">
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Mark Weiler</div>
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Equipment & Facilites Manager</div>
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Clair and John Bertucci Nanotechnology Laboratory</div>
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<a href="http://www.nanofab.ece.cmu.edu" class="">http://www.nanofab.ece.cmu.edu</a></div>
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<div class="">On Mar 11, 2019, at 3:55 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu" class="">kurt.kupcho@wisc.edu</a>> wrote:</div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Hi Mark & David –<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue.<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great – throw one in the system and it would last about 6 months
with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed
lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece
of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy
to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean
times, which seems to increase the lipseal lifetime significantly. <span class="Apple-converted-space"> </span><o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this
endeavor with you.<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Best,<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Kurt<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">---------------------------------------------------<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Kurt Kupcho<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Process Engineer/Safety Officer<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">NFC<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">1550 Engineering Drive<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">ECB Room 3110<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Madison, WI 53706<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">E: <span class="Apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu" style="color: purple; text-decoration: underline;" class=""><span style="color: blue;" class="">kurt.kupcho@wisc.edu</span></a><o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">T: 608-262-2982<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><span id="cid:image001.png@01D4D819.8076FA50"><image001.png></span></span><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""></o:p></span></div>
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<b class=""><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class="">From:</span></b><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class=""><span class="Apple-converted-space"> </span><a href="mailto:labnetwork-bounces@mtl.mit.edu" class="">labnetwork-bounces@mtl.mit.edu</a>
[<a href="mailto:labnetwork-bounces@mtl.mit.edu" class="">mailto:labnetwork-bounces@mtl.mit.edu</a>]<span class="Apple-converted-space"> </span><b class="">On Behalf Of<span class="Apple-converted-space"> </span></b>Mark Weiler<br class="">
<b class="">Sent:</b><span class="Apple-converted-space"> </span>Wednesday, March 06, 2019 8:04 AM<br class="">
<b class="">To:</b><span class="Apple-converted-space"> </span>LaFleur, David W<br class="">
<b class="">Cc:</b><span class="Apple-converted-space"> </span>Fab Network<br class="">
<b class="">Subject:</b><span class="Apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures<o:p class=""></o:p></span></div>
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Hi David,<span class="Apple-converted-space"> </span><o:p class=""></o:p></div>
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I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join
us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans.<o:p class=""></o:p></div>
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It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. <o:p class=""></o:p></div>
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My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number.<o:p class=""></o:p></div>
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Thank you for sharing your info; now I know we are not the only ones “feeling the pain” so to speak and can officially commiserate... LOL<o:p class=""></o:p></div>
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Best,<o:p class=""></o:p></div>
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Mark<o:p class=""></o:p></p>
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<b class="">Mark Weiler</b><br class="">
Equipment & Facilities Manager<span class="Apple-converted-space"> </span><o:p class=""></o:p></div>
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Claire and John Bertucci Nanotechnology Laboratory<br class="">
Electrical and Computer Engineering | Carnegie Mellon University<br class="">
<a href="x-apple-data-detectors://3/1" style="color: purple; text-decoration: underline;" class="">5000 Forbes Ave., Pittsburgh, PA 15213-3890</a><br class="">
T: <a href="tel:412.268.5430" style="color: purple; text-decoration: underline;" class="">412.268.2471</a><br class="">
F: <a href="tel:412.268.3497" style="color: purple; text-decoration: underline;" class="">412.268.3497</a><br class="">
<a href="http://www.ece.cmu.edu/" style="color: purple; text-decoration: underline;" class="">www.ece.cmu.edu</a><br class="">
<a href="http://nanofab.ece.cmu.edu/" style="color: purple; text-decoration: underline;" class="">nanofab.ece.cmu.edu</a><o:p class=""></o:p></div>
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On Mar 6, 2019, at 08:46, LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu" style="color: purple; text-decoration: underline;" class="">dlafleur@cns.fas.harvard.edu</a>> wrote:<o:p class=""></o:p></p>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Hi Mark,</span><o:p class=""></o:p></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which
uses an ESC. That has its own set of issues. We find the lip seals don’t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip
seal. One suggestion on how to make them last longer is make sure they don’t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to
the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement
works well for everyone. This is why I have just lived with the lip seals as they are.</span><o:p class=""></o:p></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Regards,</span><o:p class=""></o:p></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">David LaFleur</span><o:p class=""></o:p></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Equipment Engineer</span><o:p class=""></o:p></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">CNS, Harvard University</span><o:p class=""></o:p></div>
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<b class=""><span style="font-family: Calibri, sans-serif;" class="">From:<span class="Apple-converted-space"> </span></span></b><span style="font-family: Calibri, sans-serif;" class="">"<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: purple; text-decoration: underline;" class="">labnetwork-bounces@mtl.mit.edu</a>"
<<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: purple; text-decoration: underline;" class="">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu" style="color: purple; text-decoration: underline;" class="">mweiler@andrew.cmu.edu</a>><br class="">
<b class="">Date:<span class="Apple-converted-space"> </span></b>Tuesday, March 5, 2019 at 3:44 PM<br class="">
<b class="">To:<span class="Apple-converted-space"> </span></b>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" style="color: purple; text-decoration: underline;" class="">labnetwork@mtl.mit.edu</a>><br class="">
<b class="">Subject:<span class="Apple-converted-space"> </span></b>[labnetwork] STS DRIE Multiplex Lip Seal failures</span><o:p class=""></o:p></div>
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Hello Everyone,<span class="Apple-converted-space"> </span><o:p class=""></o:p></div>
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We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter.<o:p class=""></o:p></div>
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Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs… however, the current
ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It’s as if they are made of Buna and not meant for this application.<o:p class=""></o:p></div>
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Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen
temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data…. we just can’t complete the work due to failing seals.<o:p class=""></o:p></div>
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Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean… then
rises as time and more runs progress. Wafers are coming out with black rings on their backsides. <o:p class=""></o:p></div>
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This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us.<o:p class=""></o:p></div>
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Have any of you seen this before?<o:p class=""></o:p></div>
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Best regards,<o:p class=""></o:p></div>
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Mark<o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">________________________________________________________________</span><o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Mark Weiler</span><o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Equipment & Facilites Manager</span><o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Clair and John Bertucci Nanotechnology Laboratory</span><o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Eden Hall Nanofabrication Cleanroom</span><o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Carnegie Mellon University</span><o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">P: 412-268-2471</span><o:p class=""></o:p></div>
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<span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ece.cmu.edu&d=DwMGaQ&c=WO-RGvefibhHBZq3fL85hQ&r=6eLRBFWstHA_77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE&m=GZ5yf4iHmJa34tuDFePywye54bw-ac2pvX333zI9bnA&s=ZH-JLOPgpC2A-fi8K9m7di3gfZlrsVgsRXshO9n5YnI&e=" style="color: purple; text-decoration: underline;" class="">http://www.nanofab.ece.cmu.edu</a></span><o:p class=""></o:p></div>
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