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<span style="font-size: 12pt;">I did quite a bit of permalloy (80%Ni-20%Fe) e-plating when I was in the grad school. I had to build my own setup, as at the time I couldn't find any lab that would allow me to </span><span style="font-size: 12pt;">use their setup
for Ni/Fe plating (risk of contamination). I had heated 4L bath with constant mixing using magnetic stirrer and later recirculating using a small aquarium pump. The bath composition was according to a couple of established papers, and I ordered all </span><span style="font-size: 12pt;">the
chemicals from Sigma. </span><br>
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Aside from getting the correct 20-80 composition (came down to experimentally tweaking the current for the most part to account for different reduction potentials - this shouldn't be a big issue in your application), another issue that you particularly might
want to be aware of was the <span style="font-size: 12pt;">difference in the thickness of structures across the wafer as well as across the same </span><span style="font-size: 12pt;">structure (my structures were typically 30-100 um wide and up to 15 um thick).
This </span><span style="font-size: 12pt;">happens</span><span style="font-size: 12pt;"> because of </span><span style="font-size: 12pt;">the so-called “edge effect” resulting from increased electrodeposition rate due to current </span><span style="font-size: 12pt;">crowding
happening on edges of individual features on the plating mold as well as across </span><span style="font-size: 12pt;">the wafer. I was initially using a wafer holder that I had made and had 4 contact point on 4 corners of the </span><span style="font-size: 12pt;">wafer.
This gave really bad edge effect (the thickness difference was >25% at edges sometimes). I had to convince my boss to order a</span><span style="font-size: 12pt;"> nice custom-made wafer holder (from OAI/Idonus) with a </span><span style="font-size: 12pt;">continuous
electrode touching the periphery of the wafer, and it helped a lot by creating a more uniform field. </span></div>
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<span style="font-size: 12pt;">Good luck!</span></div>
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<span style="font-size: 12pt;">Hadi</span></div>
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<div><span style="font-size: 11pt;">Hadi Esmaeilsabzali, PhD</span></div>
<div><span style="font-size: 11pt;">4D LABS, Simon Fraser University</span><br>
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<div><span style="font-size: 11pt;">Phone: 778-782-3790</span></div>
<div><span style="font-size: 11pt;">Email: hesmaeil@sfu.ca</span></div>
<div><span style="font-size: 11pt;"><a href="http://www.4dlabs.ca/" class="OWAAutoLink" id="LPNoLP">http://www.4dlabs.ca/</a><br>
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<div id="divtagdefaultwrapper" dir="ltr" style="font-size: 12pt;"><i>Acknowledging that we live, work, and play on the unceded territory of the Musqueam, Tsleil-Waututh, and Squamish nations.</i></div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" color="#000000" style="font-size:11pt"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Milan Begliarbekov <Milan.Begliarbekov@asrc.cuny.edu><br>
<b>Sent:</b> March 12, 2019 12:24 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Electroplating Ni</font>
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<span style="font-family:"Arial",sans-serif">Hi All,</span></p>
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<span style="font-family:"Arial",sans-serif"> </span></p>
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<span style="font-family:"Arial",sans-serif">I need to electroplate Nickel into a photoresist mask. The features should be 25 microns wide and 25 microns tall. Does anyone have a suggestion about external vendors that would be good for this? Also any other
guidance about this process is highly appreciated.</span></p>
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<span style="font-family:"Arial",sans-serif"> </span></p>
<p style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">
<span style="font-family:"Arial",sans-serif">Thank you for the help,</span></p>
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<span style="font-family:"Arial",sans-serif"> </span></p>
<p style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;">
<span style="font-size:13.0pt; font-family:"Arial",sans-serif">Milan Begliarbekov</span></p>
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<span style="font-size:9.5pt; font-family:"Arial",sans-serif; color:#4472C4"><a href="https://twitter.com/asrcnanofab?lang=en" style="color: rgb(5, 99, 193); text-decoration: underline;"><span style="color:#4472C4; text-decoration:none">Research</span></a>
Assistant Professor</span></p>
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<span style="color:#4472C4; text-decoration:none">Facility</span></a> </span></p>
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<span style="font-size:8.0pt; font-family:"Arial",sans-serif; color:#767171">CUNY Advanced Science Research Center</span></p>
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<span style="font-size:8.0pt; font-family:"Arial",sans-serif; color:#767171">Office: 212-413-3311</span></p>
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