<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="ProgId" content="Word.Document">
<meta name="Generator" content="Microsoft Word 15">
<meta name="Originator" content="Microsoft Word 15">
<link rel="File-List" href="cid:filelist.xml@01D4DE53.8F4BD330"><!--[if gte mso 9]><xml>
<o:OfficeDocumentSettings>
<o:AllowPNG/>
</o:OfficeDocumentSettings>
</xml><![endif]--><!--[if gte mso 9]><xml>
<w:WordDocument>
<w:Zoom>98</w:Zoom>
<w:SpellingState>Clean</w:SpellingState>
<w:TrackMoves/>
<w:TrackFormatting/>
<w:EnvelopeVis/>
<w:ValidateAgainstSchemas/>
<w:SaveIfXMLInvalid>false</w:SaveIfXMLInvalid>
<w:IgnoreMixedContent>false</w:IgnoreMixedContent>
<w:AlwaysShowPlaceholderText>false</w:AlwaysShowPlaceholderText>
<w:DoNotPromoteQF/>
<w:LidThemeOther>EN-US</w:LidThemeOther>
<w:LidThemeAsian>X-NONE</w:LidThemeAsian>
<w:LidThemeComplexScript>X-NONE</w:LidThemeComplexScript>
<w:Compatibility>
<w:DoNotExpandShiftReturn/>
<w:BreakWrappedTables/>
<w:SplitPgBreakAndParaMark/>
<w:EnableOpenTypeKerning/>
</w:Compatibility>
<m:mathPr>
<m:mathFont m:val="Cambria Math"/>
<m:brkBin m:val="before"/>
<m:brkBinSub m:val="--"/>
<m:smallFrac m:val="off"/>
<m:dispDef/>
<m:lMargin m:val="0"/>
<m:rMargin m:val="0"/>
<m:defJc m:val="centerGroup"/>
<m:wrapIndent m:val="1440"/>
<m:intLim m:val="subSup"/>
<m:naryLim m:val="undOvr"/>
</m:mathPr></w:WordDocument>
</xml><![endif]--><!--[if gte mso 9]><xml>
<w:LatentStyles DefLockedState="false" DefUnhideWhenUsed="false" DefSemiHidden="false" DefQFormat="false" DefPriority="99" LatentStyleCount="371">
<w:LsdException Locked="false" Priority="0" QFormat="true" Name="Normal"/>
<w:LsdException Locked="false" Priority="9" QFormat="true" Name="heading 1"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 2"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 3"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 4"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 5"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 6"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 7"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 8"/>
<w:LsdException Locked="false" Priority="9" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="heading 9"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 5"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 6"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 7"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 8"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index 9"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 1"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 2"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 3"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 4"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 5"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 6"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 7"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 8"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" Name="toc 9"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Normal Indent"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="footnote text"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="annotation text"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="header"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="footer"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="index heading"/>
<w:LsdException Locked="false" Priority="35" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="caption"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="table of figures"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="envelope address"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="envelope return"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="footnote reference"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="annotation reference"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="line number"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="page number"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="endnote reference"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="endnote text"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="table of authorities"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="macro"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="toa heading"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Bullet"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Number"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List 5"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Bullet 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Bullet 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Bullet 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Bullet 5"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Number 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Number 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Number 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Number 5"/>
<w:LsdException Locked="false" Priority="10" QFormat="true" Name="Title"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Closing"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Signature"/>
<w:LsdException Locked="false" Priority="1" SemiHidden="true" UnhideWhenUsed="true" Name="Default Paragraph Font"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text Indent"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Continue"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Continue 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Continue 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Continue 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="List Continue 5"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Message Header"/>
<w:LsdException Locked="false" Priority="11" QFormat="true" Name="Subtitle"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Salutation"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Date"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text First Indent"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text First Indent 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Note Heading"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text Indent 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Body Text Indent 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Block Text"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Hyperlink"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="FollowedHyperlink"/>
<w:LsdException Locked="false" Priority="22" QFormat="true" Name="Strong"/>
<w:LsdException Locked="false" Priority="20" QFormat="true" Name="Emphasis"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Document Map"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Plain Text"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="E-mail Signature"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Top of Form"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Bottom of Form"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Normal (Web)"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Acronym"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Address"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Cite"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Code"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Definition"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Keyboard"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Preformatted"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Sample"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Typewriter"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="HTML Variable"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Normal Table"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="annotation subject"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="No List"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Outline List 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Outline List 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Outline List 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Simple 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Simple 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Simple 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Classic 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Classic 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Classic 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Classic 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Colorful 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Colorful 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Colorful 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Columns 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Columns 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Columns 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Columns 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Columns 5"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 5"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 6"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 7"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Grid 8"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 4"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 5"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 6"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 7"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table List 8"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table 3D effects 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table 3D effects 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table 3D effects 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Contemporary"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Elegant"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Professional"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Subtle 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Subtle 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Web 1"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Web 2"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Web 3"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Balloon Text"/>
<w:LsdException Locked="false" Priority="39" Name="Table Grid"/>
<w:LsdException Locked="false" SemiHidden="true" UnhideWhenUsed="true" Name="Table Theme"/>
<w:LsdException Locked="false" SemiHidden="true" Name="Placeholder Text"/>
<w:LsdException Locked="false" Priority="1" QFormat="true" Name="No Spacing"/>
<w:LsdException Locked="false" Priority="60" Name="Light Shading"/>
<w:LsdException Locked="false" Priority="61" Name="Light List"/>
<w:LsdException Locked="false" Priority="62" Name="Light Grid"/>
<w:LsdException Locked="false" Priority="63" Name="Medium Shading 1"/>
<w:LsdException Locked="false" Priority="64" Name="Medium Shading 2"/>
<w:LsdException Locked="false" Priority="65" Name="Medium List 1"/>
<w:LsdException Locked="false" Priority="66" Name="Medium List 2"/>
<w:LsdException Locked="false" Priority="67" Name="Medium Grid 1"/>
<w:LsdException Locked="false" Priority="68" Name="Medium Grid 2"/>
<w:LsdException Locked="false" Priority="69" Name="Medium Grid 3"/>
<w:LsdException Locked="false" Priority="70" Name="Dark List"/>
<w:LsdException Locked="false" Priority="71" Name="Colorful Shading"/>
<w:LsdException Locked="false" Priority="72" Name="Colorful List"/>
<w:LsdException Locked="false" Priority="73" Name="Colorful Grid"/>
<w:LsdException Locked="false" Priority="60" Name="Light Shading Accent 1"/>
<w:LsdException Locked="false" Priority="61" Name="Light List Accent 1"/>
<w:LsdException Locked="false" Priority="62" Name="Light Grid Accent 1"/>
<w:LsdException Locked="false" Priority="63" Name="Medium Shading 1 Accent 1"/>
<w:LsdException Locked="false" Priority="64" Name="Medium Shading 2 Accent 1"/>
<w:LsdException Locked="false" Priority="65" Name="Medium List 1 Accent 1"/>
<w:LsdException Locked="false" SemiHidden="true" Name="Revision"/>
<w:LsdException Locked="false" Priority="34" QFormat="true" Name="List Paragraph"/>
<w:LsdException Locked="false" Priority="29" QFormat="true" Name="Quote"/>
<w:LsdException Locked="false" Priority="30" QFormat="true" Name="Intense Quote"/>
<w:LsdException Locked="false" Priority="66" Name="Medium List 2 Accent 1"/>
<w:LsdException Locked="false" Priority="67" Name="Medium Grid 1 Accent 1"/>
<w:LsdException Locked="false" Priority="68" Name="Medium Grid 2 Accent 1"/>
<w:LsdException Locked="false" Priority="69" Name="Medium Grid 3 Accent 1"/>
<w:LsdException Locked="false" Priority="70" Name="Dark List Accent 1"/>
<w:LsdException Locked="false" Priority="71" Name="Colorful Shading Accent 1"/>
<w:LsdException Locked="false" Priority="72" Name="Colorful List Accent 1"/>
<w:LsdException Locked="false" Priority="73" Name="Colorful Grid Accent 1"/>
<w:LsdException Locked="false" Priority="60" Name="Light Shading Accent 2"/>
<w:LsdException Locked="false" Priority="61" Name="Light List Accent 2"/>
<w:LsdException Locked="false" Priority="62" Name="Light Grid Accent 2"/>
<w:LsdException Locked="false" Priority="63" Name="Medium Shading 1 Accent 2"/>
<w:LsdException Locked="false" Priority="64" Name="Medium Shading 2 Accent 2"/>
<w:LsdException Locked="false" Priority="65" Name="Medium List 1 Accent 2"/>
<w:LsdException Locked="false" Priority="66" Name="Medium List 2 Accent 2"/>
<w:LsdException Locked="false" Priority="67" Name="Medium Grid 1 Accent 2"/>
<w:LsdException Locked="false" Priority="68" Name="Medium Grid 2 Accent 2"/>
<w:LsdException Locked="false" Priority="69" Name="Medium Grid 3 Accent 2"/>
<w:LsdException Locked="false" Priority="70" Name="Dark List Accent 2"/>
<w:LsdException Locked="false" Priority="71" Name="Colorful Shading Accent 2"/>
<w:LsdException Locked="false" Priority="72" Name="Colorful List Accent 2"/>
<w:LsdException Locked="false" Priority="73" Name="Colorful Grid Accent 2"/>
<w:LsdException Locked="false" Priority="60" Name="Light Shading Accent 3"/>
<w:LsdException Locked="false" Priority="61" Name="Light List Accent 3"/>
<w:LsdException Locked="false" Priority="62" Name="Light Grid Accent 3"/>
<w:LsdException Locked="false" Priority="63" Name="Medium Shading 1 Accent 3"/>
<w:LsdException Locked="false" Priority="64" Name="Medium Shading 2 Accent 3"/>
<w:LsdException Locked="false" Priority="65" Name="Medium List 1 Accent 3"/>
<w:LsdException Locked="false" Priority="66" Name="Medium List 2 Accent 3"/>
<w:LsdException Locked="false" Priority="67" Name="Medium Grid 1 Accent 3"/>
<w:LsdException Locked="false" Priority="68" Name="Medium Grid 2 Accent 3"/>
<w:LsdException Locked="false" Priority="69" Name="Medium Grid 3 Accent 3"/>
<w:LsdException Locked="false" Priority="70" Name="Dark List Accent 3"/>
<w:LsdException Locked="false" Priority="71" Name="Colorful Shading Accent 3"/>
<w:LsdException Locked="false" Priority="72" Name="Colorful List Accent 3"/>
<w:LsdException Locked="false" Priority="73" Name="Colorful Grid Accent 3"/>
<w:LsdException Locked="false" Priority="60" Name="Light Shading Accent 4"/>
<w:LsdException Locked="false" Priority="61" Name="Light List Accent 4"/>
<w:LsdException Locked="false" Priority="62" Name="Light Grid Accent 4"/>
<w:LsdException Locked="false" Priority="63" Name="Medium Shading 1 Accent 4"/>
<w:LsdException Locked="false" Priority="64" Name="Medium Shading 2 Accent 4"/>
<w:LsdException Locked="false" Priority="65" Name="Medium List 1 Accent 4"/>
<w:LsdException Locked="false" Priority="66" Name="Medium List 2 Accent 4"/>
<w:LsdException Locked="false" Priority="67" Name="Medium Grid 1 Accent 4"/>
<w:LsdException Locked="false" Priority="68" Name="Medium Grid 2 Accent 4"/>
<w:LsdException Locked="false" Priority="69" Name="Medium Grid 3 Accent 4"/>
<w:LsdException Locked="false" Priority="70" Name="Dark List Accent 4"/>
<w:LsdException Locked="false" Priority="71" Name="Colorful Shading Accent 4"/>
<w:LsdException Locked="false" Priority="72" Name="Colorful List Accent 4"/>
<w:LsdException Locked="false" Priority="73" Name="Colorful Grid Accent 4"/>
<w:LsdException Locked="false" Priority="60" Name="Light Shading Accent 5"/>
<w:LsdException Locked="false" Priority="61" Name="Light List Accent 5"/>
<w:LsdException Locked="false" Priority="62" Name="Light Grid Accent 5"/>
<w:LsdException Locked="false" Priority="63" Name="Medium Shading 1 Accent 5"/>
<w:LsdException Locked="false" Priority="64" Name="Medium Shading 2 Accent 5"/>
<w:LsdException Locked="false" Priority="65" Name="Medium List 1 Accent 5"/>
<w:LsdException Locked="false" Priority="66" Name="Medium List 2 Accent 5"/>
<w:LsdException Locked="false" Priority="67" Name="Medium Grid 1 Accent 5"/>
<w:LsdException Locked="false" Priority="68" Name="Medium Grid 2 Accent 5"/>
<w:LsdException Locked="false" Priority="69" Name="Medium Grid 3 Accent 5"/>
<w:LsdException Locked="false" Priority="70" Name="Dark List Accent 5"/>
<w:LsdException Locked="false" Priority="71" Name="Colorful Shading Accent 5"/>
<w:LsdException Locked="false" Priority="72" Name="Colorful List Accent 5"/>
<w:LsdException Locked="false" Priority="73" Name="Colorful Grid Accent 5"/>
<w:LsdException Locked="false" Priority="60" Name="Light Shading Accent 6"/>
<w:LsdException Locked="false" Priority="61" Name="Light List Accent 6"/>
<w:LsdException Locked="false" Priority="62" Name="Light Grid Accent 6"/>
<w:LsdException Locked="false" Priority="63" Name="Medium Shading 1 Accent 6"/>
<w:LsdException Locked="false" Priority="64" Name="Medium Shading 2 Accent 6"/>
<w:LsdException Locked="false" Priority="65" Name="Medium List 1 Accent 6"/>
<w:LsdException Locked="false" Priority="66" Name="Medium List 2 Accent 6"/>
<w:LsdException Locked="false" Priority="67" Name="Medium Grid 1 Accent 6"/>
<w:LsdException Locked="false" Priority="68" Name="Medium Grid 2 Accent 6"/>
<w:LsdException Locked="false" Priority="69" Name="Medium Grid 3 Accent 6"/>
<w:LsdException Locked="false" Priority="70" Name="Dark List Accent 6"/>
<w:LsdException Locked="false" Priority="71" Name="Colorful Shading Accent 6"/>
<w:LsdException Locked="false" Priority="72" Name="Colorful List Accent 6"/>
<w:LsdException Locked="false" Priority="73" Name="Colorful Grid Accent 6"/>
<w:LsdException Locked="false" Priority="19" QFormat="true" Name="Subtle Emphasis"/>
<w:LsdException Locked="false" Priority="21" QFormat="true" Name="Intense Emphasis"/>
<w:LsdException Locked="false" Priority="31" QFormat="true" Name="Subtle Reference"/>
<w:LsdException Locked="false" Priority="32" QFormat="true" Name="Intense Reference"/>
<w:LsdException Locked="false" Priority="33" QFormat="true" Name="Book Title"/>
<w:LsdException Locked="false" Priority="37" SemiHidden="true" UnhideWhenUsed="true" Name="Bibliography"/>
<w:LsdException Locked="false" Priority="39" SemiHidden="true" UnhideWhenUsed="true" QFormat="true" Name="TOC Heading"/>
<w:LsdException Locked="false" Priority="41" Name="Plain Table 1"/>
<w:LsdException Locked="false" Priority="42" Name="Plain Table 2"/>
<w:LsdException Locked="false" Priority="43" Name="Plain Table 3"/>
<w:LsdException Locked="false" Priority="44" Name="Plain Table 4"/>
<w:LsdException Locked="false" Priority="45" Name="Plain Table 5"/>
<w:LsdException Locked="false" Priority="40" Name="Grid Table Light"/>
<w:LsdException Locked="false" Priority="46" Name="Grid Table 1 Light"/>
<w:LsdException Locked="false" Priority="47" Name="Grid Table 2"/>
<w:LsdException Locked="false" Priority="48" Name="Grid Table 3"/>
<w:LsdException Locked="false" Priority="49" Name="Grid Table 4"/>
<w:LsdException Locked="false" Priority="50" Name="Grid Table 5 Dark"/>
<w:LsdException Locked="false" Priority="51" Name="Grid Table 6 Colorful"/>
<w:LsdException Locked="false" Priority="52" Name="Grid Table 7 Colorful"/>
<w:LsdException Locked="false" Priority="46" Name="Grid Table 1 Light Accent 1"/>
<w:LsdException Locked="false" Priority="47" Name="Grid Table 2 Accent 1"/>
<w:LsdException Locked="false" Priority="48" Name="Grid Table 3 Accent 1"/>
<w:LsdException Locked="false" Priority="49" Name="Grid Table 4 Accent 1"/>
<w:LsdException Locked="false" Priority="50" Name="Grid Table 5 Dark Accent 1"/>
<w:LsdException Locked="false" Priority="51" Name="Grid Table 6 Colorful Accent 1"/>
<w:LsdException Locked="false" Priority="52" Name="Grid Table 7 Colorful Accent 1"/>
<w:LsdException Locked="false" Priority="46" Name="Grid Table 1 Light Accent 2"/>
<w:LsdException Locked="false" Priority="47" Name="Grid Table 2 Accent 2"/>
<w:LsdException Locked="false" Priority="48" Name="Grid Table 3 Accent 2"/>
<w:LsdException Locked="false" Priority="49" Name="Grid Table 4 Accent 2"/>
<w:LsdException Locked="false" Priority="50" Name="Grid Table 5 Dark Accent 2"/>
<w:LsdException Locked="false" Priority="51" Name="Grid Table 6 Colorful Accent 2"/>
<w:LsdException Locked="false" Priority="52" Name="Grid Table 7 Colorful Accent 2"/>
<w:LsdException Locked="false" Priority="46" Name="Grid Table 1 Light Accent 3"/>
<w:LsdException Locked="false" Priority="47" Name="Grid Table 2 Accent 3"/>
<w:LsdException Locked="false" Priority="48" Name="Grid Table 3 Accent 3"/>
<w:LsdException Locked="false" Priority="49" Name="Grid Table 4 Accent 3"/>
<w:LsdException Locked="false" Priority="50" Name="Grid Table 5 Dark Accent 3"/>
<w:LsdException Locked="false" Priority="51" Name="Grid Table 6 Colorful Accent 3"/>
<w:LsdException Locked="false" Priority="52" Name="Grid Table 7 Colorful Accent 3"/>
<w:LsdException Locked="false" Priority="46" Name="Grid Table 1 Light Accent 4"/>
<w:LsdException Locked="false" Priority="47" Name="Grid Table 2 Accent 4"/>
<w:LsdException Locked="false" Priority="48" Name="Grid Table 3 Accent 4"/>
<w:LsdException Locked="false" Priority="49" Name="Grid Table 4 Accent 4"/>
<w:LsdException Locked="false" Priority="50" Name="Grid Table 5 Dark Accent 4"/>
<w:LsdException Locked="false" Priority="51" Name="Grid Table 6 Colorful Accent 4"/>
<w:LsdException Locked="false" Priority="52" Name="Grid Table 7 Colorful Accent 4"/>
<w:LsdException Locked="false" Priority="46" Name="Grid Table 1 Light Accent 5"/>
<w:LsdException Locked="false" Priority="47" Name="Grid Table 2 Accent 5"/>
<w:LsdException Locked="false" Priority="48" Name="Grid Table 3 Accent 5"/>
<w:LsdException Locked="false" Priority="49" Name="Grid Table 4 Accent 5"/>
<w:LsdException Locked="false" Priority="50" Name="Grid Table 5 Dark Accent 5"/>
<w:LsdException Locked="false" Priority="51" Name="Grid Table 6 Colorful Accent 5"/>
<w:LsdException Locked="false" Priority="52" Name="Grid Table 7 Colorful Accent 5"/>
<w:LsdException Locked="false" Priority="46" Name="Grid Table 1 Light Accent 6"/>
<w:LsdException Locked="false" Priority="47" Name="Grid Table 2 Accent 6"/>
<w:LsdException Locked="false" Priority="48" Name="Grid Table 3 Accent 6"/>
<w:LsdException Locked="false" Priority="49" Name="Grid Table 4 Accent 6"/>
<w:LsdException Locked="false" Priority="50" Name="Grid Table 5 Dark Accent 6"/>
<w:LsdException Locked="false" Priority="51" Name="Grid Table 6 Colorful Accent 6"/>
<w:LsdException Locked="false" Priority="52" Name="Grid Table 7 Colorful Accent 6"/>
<w:LsdException Locked="false" Priority="46" Name="List Table 1 Light"/>
<w:LsdException Locked="false" Priority="47" Name="List Table 2"/>
<w:LsdException Locked="false" Priority="48" Name="List Table 3"/>
<w:LsdException Locked="false" Priority="49" Name="List Table 4"/>
<w:LsdException Locked="false" Priority="50" Name="List Table 5 Dark"/>
<w:LsdException Locked="false" Priority="51" Name="List Table 6 Colorful"/>
<w:LsdException Locked="false" Priority="52" Name="List Table 7 Colorful"/>
<w:LsdException Locked="false" Priority="46" Name="List Table 1 Light Accent 1"/>
<w:LsdException Locked="false" Priority="47" Name="List Table 2 Accent 1"/>
<w:LsdException Locked="false" Priority="48" Name="List Table 3 Accent 1"/>
<w:LsdException Locked="false" Priority="49" Name="List Table 4 Accent 1"/>
<w:LsdException Locked="false" Priority="50" Name="List Table 5 Dark Accent 1"/>
<w:LsdException Locked="false" Priority="51" Name="List Table 6 Colorful Accent 1"/>
<w:LsdException Locked="false" Priority="52" Name="List Table 7 Colorful Accent 1"/>
<w:LsdException Locked="false" Priority="46" Name="List Table 1 Light Accent 2"/>
<w:LsdException Locked="false" Priority="47" Name="List Table 2 Accent 2"/>
<w:LsdException Locked="false" Priority="48" Name="List Table 3 Accent 2"/>
<w:LsdException Locked="false" Priority="49" Name="List Table 4 Accent 2"/>
<w:LsdException Locked="false" Priority="50" Name="List Table 5 Dark Accent 2"/>
<w:LsdException Locked="false" Priority="51" Name="List Table 6 Colorful Accent 2"/>
<w:LsdException Locked="false" Priority="52" Name="List Table 7 Colorful Accent 2"/>
<w:LsdException Locked="false" Priority="46" Name="List Table 1 Light Accent 3"/>
<w:LsdException Locked="false" Priority="47" Name="List Table 2 Accent 3"/>
<w:LsdException Locked="false" Priority="48" Name="List Table 3 Accent 3"/>
<w:LsdException Locked="false" Priority="49" Name="List Table 4 Accent 3"/>
<w:LsdException Locked="false" Priority="50" Name="List Table 5 Dark Accent 3"/>
<w:LsdException Locked="false" Priority="51" Name="List Table 6 Colorful Accent 3"/>
<w:LsdException Locked="false" Priority="52" Name="List Table 7 Colorful Accent 3"/>
<w:LsdException Locked="false" Priority="46" Name="List Table 1 Light Accent 4"/>
<w:LsdException Locked="false" Priority="47" Name="List Table 2 Accent 4"/>
<w:LsdException Locked="false" Priority="48" Name="List Table 3 Accent 4"/>
<w:LsdException Locked="false" Priority="49" Name="List Table 4 Accent 4"/>
<w:LsdException Locked="false" Priority="50" Name="List Table 5 Dark Accent 4"/>
<w:LsdException Locked="false" Priority="51" Name="List Table 6 Colorful Accent 4"/>
<w:LsdException Locked="false" Priority="52" Name="List Table 7 Colorful Accent 4"/>
<w:LsdException Locked="false" Priority="46" Name="List Table 1 Light Accent 5"/>
<w:LsdException Locked="false" Priority="47" Name="List Table 2 Accent 5"/>
<w:LsdException Locked="false" Priority="48" Name="List Table 3 Accent 5"/>
<w:LsdException Locked="false" Priority="49" Name="List Table 4 Accent 5"/>
<w:LsdException Locked="false" Priority="50" Name="List Table 5 Dark Accent 5"/>
<w:LsdException Locked="false" Priority="51" Name="List Table 6 Colorful Accent 5"/>
<w:LsdException Locked="false" Priority="52" Name="List Table 7 Colorful Accent 5"/>
<w:LsdException Locked="false" Priority="46" Name="List Table 1 Light Accent 6"/>
<w:LsdException Locked="false" Priority="47" Name="List Table 2 Accent 6"/>
<w:LsdException Locked="false" Priority="48" Name="List Table 3 Accent 6"/>
<w:LsdException Locked="false" Priority="49" Name="List Table 4 Accent 6"/>
<w:LsdException Locked="false" Priority="50" Name="List Table 5 Dark Accent 6"/>
<w:LsdException Locked="false" Priority="51" Name="List Table 6 Colorful Accent 6"/>
<w:LsdException Locked="false" Priority="52" Name="List Table 7 Colorful Accent 6"/>
</w:LatentStyles>
</xml><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;
mso-font-charset:0;
mso-generic-font-family:roman;
mso-font-pitch:variable;
mso-font-signature:-536869121 1107305727 33554432 0 415 0;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;
mso-font-charset:0;
mso-generic-font-family:swiss;
mso-font-pitch:variable;
mso-font-signature:-536858881 -1073732485 9 0 511 0;}
@font-face
{font-family:"Segoe UI";
panose-1:2 11 5 2 4 2 4 2 2 3;
mso-font-charset:0;
mso-generic-font-family:swiss;
mso-font-pitch:variable;
mso-font-signature:-469750017 -1073683329 9 0 511 0;}
@font-face
{font-family:"Segoe UI Light";
panose-1:2 11 5 2 4 2 4 2 2 3;
mso-font-charset:0;
mso-generic-font-family:swiss;
mso-font-pitch:variable;
mso-font-signature:-469750017 -1073683329 9 0 511 0;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{mso-style-unhide:no;
mso-style-qformat:yes;
mso-style-parent:"";
margin:0in;
margin-bottom:.0001pt;
mso-pagination:widow-orphan;
font-size:12.0pt;
font-family:"Times New Roman",serif;
mso-fareast-font-family:Calibri;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;
text-underline:single;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-noshow:yes;
mso-style-priority:99;
color:purple;
text-decoration:underline;
text-underline:single;}
p
{mso-style-noshow:yes;
mso-style-priority:99;
margin:0in;
margin-bottom:.0001pt;
mso-pagination:widow-orphan;
font-size:12.0pt;
font-family:"Times New Roman",serif;
mso-fareast-font-family:Calibri;}
span.EmailStyle18
{mso-style-type:personal-reply;
mso-style-noshow:yes;
mso-style-unhide:no;
mso-ansi-font-size:11.0pt;
mso-bidi-font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-ascii-font-family:Calibri;
mso-fareast-font-family:Calibri;
mso-hansi-font-family:Calibri;
mso-bidi-font-family:"Times New Roman";
color:#1F497D;}
span.SpellE
{mso-style-name:"";
mso-spl-e:yes;}
.MsoChpDefault
{mso-style-type:export-only;
mso-default-props:yes;
font-size:10.0pt;
mso-ansi-font-size:10.0pt;
mso-bidi-font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;
mso-header-margin:.5in;
mso-footer-margin:.5in;
mso-paper-source:0;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 10]><style>/* Style Definitions */
table.MsoNormalTable
{mso-style-name:"Table Normal";
mso-tstyle-rowband-size:0;
mso-tstyle-colband-size:0;
mso-style-noshow:yes;
mso-style-priority:99;
mso-style-parent:"";
mso-padding-alt:0in 5.4pt 0in 5.4pt;
mso-para-margin:0in;
mso-para-margin-bottom:.0001pt;
mso-pagination:widow-orphan;
font-size:10.0pt;
font-family:"Times New Roman",serif;}
</style><![endif]--><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple" style="tab-interval:.5in">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%">Hi Michael,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%">Our fab does not do a lot of traditional CMOS
work, so I am by no means an expert in this area.<span style="mso-spacerun:yes">
</span>A lot of our work is concentrated in MEMS (including back-end processing on CMOS
<span class="SpellE">tapeout</span> chips), magnetics, <span class="SpellE">spintronics</span>, photonics, 2D materials, functional oxides, bio interfaces, other emerging technologies.
<span style="mso-spacerun:yes"> </span>However, I can hopefully offer a few comments from lessons learned or experiences we’ve had in the past, especially when working on devices where trapped charge or ion contamination were an issue.<span style="mso-spacerun:yes">
</span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%">Referencing your original question numbers:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%">1. We typically use PTFE petri dishes for this
application.<span style="mso-spacerun:yes"> </span>We routinely process 100mm wafers in low profile
<span style="mso-spacerun:yes"> </span>evaporating dishes.<span style="mso-spacerun:yes">
</span>While not cheap, a couple dishes won’t typically set you back too much.<span style="mso-spacerun:yes">
</span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%">2. We separate glassware for metal ion free
(MIF) and metal ion containing (MIC) containers (I’m assuming you are using MIF developers for CMOS).<span style="mso-spacerun:yes">
</span>Beakers are labeled MIF or MIC by etching the letters into the glass exterior of the beaker.<span style="mso-spacerun:yes">
</span>If I recall correctly most of the beakers </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%">are
<span style="background:white">Type 1, Class A, 33 expansion Borosilicate glass (note that I’m not endorsing this one way or the other for CMOS).<span style="mso-spacerun:yes">
</span><o:p></o:p></span></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white"><span style="mso-spacerun:yes"> </span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white">2A. We do not have a dedicated spinner for CMOS, but we do limit which
resists can go in which spinners (in the case where non-standard resists are used).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white">2B.<span style="mso-spacerun:yes">
</span>I would verify the type of glass used in the amber bottles.<span style="mso-spacerun:yes">
</span>Also, we buy droppers in clean, sterile packaging, as we have seen that droppers packaged and stored incorrectly can introduce contaminates.<span style="mso-spacerun:yes">
</span>In extreme cases, we have had some users request and move to glass pipettes.<span style="mso-spacerun:yes">
</span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white">2C.<span style="mso-spacerun:yes">
</span>The shared bath of NMP would be one of my biggest concerns in this whole process.<span style="mso-spacerun:yes">
</span>Manufacturers will list that NMP is safe on a lot of metals, including copper.<span style="mso-spacerun:yes">
</span>However, there is a caveat.<span style="mso-spacerun:yes"> </span>If the NMP bath collects or becomes contaminated with moisture, it makes the bath corrosive.<span style="mso-spacerun:yes">
</span>I have seen first-hand how NMP can corrode, or even etch through metals, such as copper.<span style="mso-spacerun:yes">
</span>If people are using the bath with such materials, it could have trace metals and other contaminants.<span style="mso-spacerun:yes">
</span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white">We do not do a lot in the way of furnace work, so I will default to
others in the network that are much more of an expert in this area than me, but for what it’s worth, the latter questions on quartz tube contaminants would be a concern in my opinion.<span style="mso-spacerun:yes">
</span>Even in simple annealing furnaces and our RTA, we keep “clean” and “dirty” tubes/chambers that we exchange depending on the materials being used.<span style="mso-spacerun:yes">
</span>In regards to potential vendors, we have purchased quartz products from Technical Glass Products in the past (<a href="https://technicalglass.com/"><span style="color:#0000BF;mso-style-textfill-fill-color:#0000BF;mso-style-textfill-fill-alpha:100.0%">https://technicalglass.com/</span></a>),
although, again, others who do a lot more work with furnaces will likely have more input than me.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white">Hope this helps in some capacity.<span style="mso-spacerun:yes">
</span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white">Best Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%;background:white"><br>
Matt</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#2F5597;mso-style-textfill-fill-color:#2F5597;mso-style-textfill-fill-alpha:100.0%"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";mso-bidi-font-family:"Times New Roman";color:#1F497D;mso-no-proof:yes">--
<br>
<b>Matthew T. Moneck, Ph.D.</b><br>
Executive Manager, Claire & John Bertucci Nanotechnology Laboratory<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
5000 Forbes Ave., Pittsburgh, PA 15213-3890<br>
T: 412.268.5430<br>
F: 412.268.3497<br>
<a href="http://www.ece.cmu.edu/">www.ece.cmu.edu</a><br>
nanofab.ece.cmu.edu<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman"">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman""> labnetwork-bounces@mtl.mit.edu
[mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Martin,Michael David<br>
<b>Sent:</b> Monday, March 18, 2019 2:07 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] CMOS Clean in a MEMS Fab Facility<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">Hi,
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black"> I'm trying to track down potential sources of contamination for a CMOS process we are trying to run through our predominantly MEMS fab
here at U of Louisville. Really the only pieces of equipment that are dedicated for CMOS type processes is our RCA bench, an older Technics sputterer, and our oxidation furnace (sort of, see below). So I have a few questions for those of you who have experience
with this: <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">1) For HF etch/dips is there a particular polymer type or brand we should use for our containers that are known to be free of trace metals?
Can I avoid PTFE as this is super expensive? <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">2) When you do litho do you have separate labware for developing? We currently use a Pyrex pan develop which I know is a No-No due to Na
and other ions. What sort of container does your lab use (assuming pan develop)? <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black"> 2 a) Do you have a dedicated spinner for CMOS?
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black"> 2 b) Is there any danger that we are picking up contamination from the amber bottles we are temporarily storing our resists in? What
about the polypropylene droppers we are dispensing resists with? <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black"> 2 c) What about resist stripping after etching? We typically use a big warm vat of NMP that is shared by all users. We can also do
a plasma etch but I worry about carry over from other folks as none of our plasma etchers are dedicated CMOS.
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">3) I presume quartz glassware works for my metal (usually aluminum) etching? Do you do regular aqua regia cleans on quartz-ware to scavenge
other metals and potential contaminants? <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">4) We gravitate to peek tipped metal tweezers. Are they okay? Do you regularly run the tips through a RCA clean?
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">5) Oxidation furnace: Before trying to transition to CMOS like devices the tube was used with non-RCA cleaned wafers and a pyrex bubbler.
After moving to a quartz bubbler with DI water we cleaned the 4" tube with HF. This is the one I'm really concerned about because I'm guessing that ionic contamination that might have been removed from the surface will readily diffuse back at 1000C. So should
we just bite the bullet and buy a new tube? Any vendor suggestions for a 4" Blue-M?
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">6) Any other suggestions other than buying a dedicated CMOS tool set?
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";color:black">I did find a very nice document from Stanford that has a lot of practical suggestions found here
<a href="https://web.stanford.edu/class/ee410/cleaning.pdf" id="LPlnk395163">https://web.stanford.edu/class/ee410/cleaning.pdf</a> )<o:p></o:p></span></p>
</div>
<div style="margin-top:12.0pt;margin-bottom:12.0pt;max-width: 800px;min-width: 424px" id="LPBorder_GTaHR0cHM6Ly93ZWIuc3RhbmZvcmQuZWR1L2NsYXNzL2VlNDEwL2NsZWFuaW5nLnBkZg..">
<table class="MsoNormalTable" border="1" cellspacing="3" cellpadding="0" width="100%" style="width:100.0%;mso-cellspacing:1.5pt;border:solid #C8C8C8 1.0pt;mso-border-alt:solid #C8C8C8 .75pt;mso-yfti-tbllook:1184;mso-padding-alt:9.0pt 27.0pt 9.0pt 9.0pt">
<tbody>
<tr style="mso-yfti-irow:0;mso-yfti-firstrow:yes;mso-yfti-lastrow:yes">
<td width="100%" valign="top" style="width:100.0%;border:none;padding:9.0pt 27.0pt 9.0pt 9.0pt">
<div style="margin-right:6.0pt;margin-bottom:9.0pt" id="LPTitle778519">
<p class="MsoNormal"><span style="font-size:16.0pt;font-family:"Segoe UI Light",sans-serif;mso-fareast-font-family:"Times New Roman""><a href="https://web.stanford.edu/class/ee410/cleaning.pdf" target="_blank"><span style="text-decoration:none;text-underline:none">Krishna
Saraswa - Stanford University</span></a><o:p></o:p></span></p>
</div>
<div style="margin-right:6.0pt;margin-bottom:9.0pt;max-height:100px;overflow:hidden" id="LPDescription778519">
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;mso-fareast-font-family:"Times New Roman";color:#666666">6 tanford University araswat 11! Cleaning - Surface Issues Contaminant • Organics – Skin oils – Resist – Polymers •
Metals<o:p></o:p></span></p>
</div>
<div id="LPMetadata778519">
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Segoe UI",sans-serif;mso-fareast-font-family:"Times New Roman";color:#A6A6A6">web.stanford.edu<o:p></o:p></span></p>
</div>
</td>
</tr>
</tbody>
</table>
</div>
<p class="MsoNormal"><span style="mso-fareast-font-family:"Times New Roman""><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="mso-fareast-font-family:"Times New Roman"">Thank you in advance,
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="mso-fareast-font-family:"Times New Roman""> Michael
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="mso-fareast-font-family:"Times New Roman""> <o:p>
</o:p></span></p>
</div>
</div>
</body>
</html>