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Hi Patrick,<br>
<br>
My systems meet 68 +/- 0.5 degF year round.<br>
<br>
When it comes to humidity they achieve the equivalent of 45 +/-2 %RH
during the humidification and dehumidification seasons. I am working
on achieving that during the "shoulder seasons" as well. I control
to dewpoint (rather than relative humidity) because it has more
physical meaning.<br>
<br>
Good luck,<br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director of Operations, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 3/18/2019 3:08 PM, Johnson, Patrick
wrote:<br>
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cite="mid:CAGopbFKs9nQWquzJ+bi6fcnGWNBpbqjDCK6h=nyFGKFUD60DZg@mail.gmail.com">
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<div dir="ltr"> Hello Colleagues, what do the other NanoFabs
basically have there cleanrooms temp and humidity specs set at?
I have been in Semiconductor since 1995 and 67F +/- 1 degree and
humidity 45-47% is what I have encountered. I appreciate any
input from the LabNetwork partners. Thanks Patrick <br
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<div><b><i>Patrick Johnson</i></b>
<div><i>George Washington University</i></div>
<div><i>Nano Fabrication Lab Manager </i></div>
<div><i>Science and Engineering Hall</i></div>
<div><i>800 NW 22nd Street Rm-B2815</i></div>
<div><i>Washington D.C. 20052</i></div>
<div><i>Cell 703 258 2465</i></div>
</div>
<div><i>Desk 202 994 2346</i></div>
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</pre>
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