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font-family:"Calibri",sans-serif;
color:windowtext;}
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">We’re at 68.5 deg +/- 0.5 deg and 40% +/- 5%.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">- John<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">John P. Nibarger, Ph.D.</span><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Manager, Boulder Micro-fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Microfabrication Group Leader (687.10)</span><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">National Institute of Standards and Technology</span><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">325 Broadway, MS 687.10<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Boulder, CO 80305<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">303-497-4575 (phone)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">303-497-3042 (fax)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><a href="mailto:john.nibarger@nist.gov"><span style="color:blue">john.nibarger@nist.gov</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="color:black">From: </span></b><span style="color:black"><labnetwork-bounces@mtl.mit.edu> on behalf of Matthew Moneck <mmoneck@andrew.cmu.edu><br>
<b>Date: </b>Tuesday, March 19, 2019 at 5:42 AM<br>
<b>To: </b>"Johnson, Patrick" <paj1@email.gwu.edu>, "labnetwork@mtl.mit.edu" <labnetwork@mtl.mit.edu><br>
<b>Subject: </b>Re: [labnetwork] Clean room / Nanofab temp/<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Patrick,</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Our systems are set to target 68 deg +/- 0.5 deg and 40% +/- 1%.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Best Regards,</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><br>
Matt</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">--
<br>
<b>Matthew T. Moneck, Ph.D.</b><br>
Executive Manager, Claire & John Bertucci Nanotechnology Laboratory<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
5000 Forbes Ave., Pittsburgh, PA 15213-3890<br>
T: 412.268.5430<br>
F: 412.268.3497<br>
<a href="https://gcc01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.ece.cmu.edu%2F&data=02%7C01%7Cjohn.nibarger%40nist.gov%7Cb687257dc7b844fc327008d6ac5ff317%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636885925445994392&sdata=sO7%2BNbKhxQcC5lsj6wRHyZjsBWuYRjytVvX3UFjN0YU%3D&reserved=0"><span style="color:blue">www.ece.cmu.edu</span></a><br>
nanofab.ece.cmu.edu</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Johnson, Patrick<br>
<b>Sent:</b> Monday, March 18, 2019 3:08 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Clean room / Nanofab temp/</span><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"> Hello Colleagues, what do the other NanoFabs basically have there cleanrooms temp and humidity specs set at? I have been in Semiconductor since 1995 and 67F +/- 1 degree and humidity 45-47% is what I have encountered. I appreciate
any input from the LabNetwork partners. Thanks Patrick <br clear="all">
<o:p></o:p></p>
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<p class="MsoNormal"><b><i>Patrick Johnson</i></b><o:p></o:p></p>
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<p class="MsoNormal"><i>George Washington University</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Nano Fabrication Lab Manager </i><o:p></o:p></p>
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<p class="MsoNormal"><i>Science and Engineering Hall</i><o:p></o:p></p>
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<p class="MsoNormal"><i>800 NW 22nd Street Rm-B2815</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Washington D.C. 20052</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Cell 703 258 2465</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Desk 202 994 2346</i><o:p></o:p></p>
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