<div dir="ltr"><div dir="ltr">Christophe,<div><br></div><div>For a more accurate analysis of the contamination in the glass, if you are willing to spend the money, you could do VPD ICP-MS. This is what we use to check contamination from processing in our tools. We use Balazs to analyze the samples (<a href="https://www.electronics-airliquide.com/our-brands/balazstm-nanoanalysis">https://www.electronics-airliquide.com/our-brands/balazstm-nanoanalysis</a>). They can check for up to ~35 elements on a sample, and we often do a second wafer for noble metals (Au, Ag, Pt). </div><div><br></div><div>We etch various kinds of glass (fused silica, borosilicate, etc) in our STS APS system, although I haven't specifically had anyone request gorilla glass. I use the same cleaning procedure as I would for fused silica, although our tool isn't all that "clean" to begin with. You could check cross contamination by running a gorilla glass wafer followed by a clean Si wafer and sending the latter out for analysis.</div><div><br></div><div>-Kevin</div></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Mar 7, 2019 at 7:46 PM Christophe Clément <<a href="mailto:christophe.clement@polymtl.ca">christophe.clement@polymtl.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div><div style="font-family:Arial;font-size:10pt;color:rgb(51,102,102)"><div></div><div>Hello Labnetwork community, </div><div>I've been ask by a company to etch Gorilla Glass in our DRIE-ICP etcher (Oxford Plasmalab 100), where we already etch Si (regular Bosch process) and SiO2 etching (Fused silica only). As the supplier of the Gorilla glass does not share the composition of this kind of glass, I'm a little bit afraid of cross contamination (Potassium and other material that can be present in the glass) that can be found during Si etching for example.</div><div>Is there anyone who has experienced etching this material? If yes, what is your cleaning procedure after etching Gorilla glass?</div><div><br></div><div>Thank you in advance for your answer</div><div>Best</div><div>Christophe</div><div><br></div><div>
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<p class="MsoNormal"><b><i><span style="font-size:12pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">Christophe Clément</span></i></b><span lang="EN-US"></span></p>
<p class="MsoNormal"><b><span style="font-size:10pt;font-family:Arial,sans-serif;color:gray">Technicien laboratoire</span></b><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Laboratoire de microfabrication (LMF)</span><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca" target="_blank">www.gcmlab.ca</a></u></span><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Ecole Polytechnique de Montréal </span><a href="http://www.polymtl.ca/" target="_blank"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">www.polymtl.ca</span></a><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Département de génie physique </span><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:10pt;font-family:Wingdings;color:rgb(31,73,125)">*</span><span style="font-size:8pt;font-family:Arial,sans-serif;color:rgb(51,51,51)"> </span><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">2900 Boulevard Edouard Monpetit</span><span lang="EN-US"></span></p>
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Campus de l'Université de Montréal<br>
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<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray"><br>
</span><span style="font-size:10pt;font-family:Wingdings;color:rgb(31,73,125)">8</span><span style="font-size:8pt;font-family:Arial,sans-serif;color:rgb(51,51,51)"> </span><a href="mailto:christophe.clement@polymtl.ca" target="_blank"><span style="font-size:8pt;font-family:Arial,sans-serif;color:blue">christophe.clement@polymtl.ca</span></a><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:10pt;font-family:Wingdings;color:rgb(31,73,125)">(</span><span style="font-size:8pt;font-family:Arial,sans-serif;color:rgb(51,51,51)"> </span><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">514 340 4711</span><span lang="EN-US"></span></p>
<p class="MsoNormal"><span style="font-size:8pt;font-family:Arial,sans-serif;color:gray">Fax : 514 340 4711 # 2417 </span><span lang="EN-US"></span></p>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div>Kevin Owen<div>Senior Engineer in Research</div><div>Operations Group, Lurie Nanofabrication Facility</div><div>University of Michigan</div><div>(734) 545-4014</div></div></div></div></div></div>