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<div>Mason:</div>
<div>I started storing HSQ in liquid N2 (make sure you crack open the lid when you take it out, some N2 will get into your bottle) and it works great. I started doing this at Mike's suggestion and completely agree with him.
<br>
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<div>We had been decanting from the Dow, 100ml, containers to 1.5 mL cryo tubes in a glove box before we started with the liquid N2. This worked well for us so we continued doing it, though the glove box may not be necessary (segregating the HSQ from solvents,
especially NMP is the goal). We then store the cryo tubes in a -60C fridge in the lab for convenience (little room for a dewar in the lab).</div>
<div><br>
</div>
<div>The dry HSQ is advertised to have a very long shelf life if stored in a dry environment. I have not tried to use it yet, but have some on hand.</div>
<div><br>
</div>
<div>HSQ delivery times, from Dow, are variable. Last time I ordered 6% in November, it arrived mid-March.</div>
<div><br>
</div>
<div>Regards,</div>
<div>Mark K Mondol <br>
</div>
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<div id="divRpF934669" style="direction: ltr;"><font size="2" face="Tahoma" color="#000000"><b>From:</b> Mason Risley [mrisley@andrew.cmu.edu]<br>
<b>Sent:</b> Monday, April 01, 2019 10:23 AM<br>
<b>To:</b> Michael Rooks; Mark K Mondol; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> RE: [labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?<br>
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<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Thanks Michael, that is good information. I had it in mind to switch to cold storage and those HC LN2 refrigerators seem like a great way to go.
</span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D"> </span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">I’ve also heard it helps to dispense the HSQ into the 4mL vials while in a nitrogen glove box to prevent exposing the stock solution to oxygen or humidity,
do you guys do the same or do you just transfer from the stock bottle under ambient conditions in the clean room before freezing?
</span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:windowtext">From:</span></b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:windowtext"> Michael Rooks <michael.rooks@yale.edu>
<br>
<b>Sent:</b> Monday, April 1, 2019 10:16 AM<br>
<b>To:</b> Mason Risley <mrisley@andrew.cmu.edu>; Mark K Mondol <mondol@mit.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?</span></p>
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</div>
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<div>
<p class="MsoNormal">You should be storing HSQ in liquid nitrogen. Check out the presentation
<br>
<a href="https://nano.yale.edu/sites/default/files/files/hsq_frozen(1).pdf" target="_blank" rel="noopener noreferrer">https://nano.yale.edu/sites/default/files/files/hsq_frozen(1).pdf</a><br>
<br>
We have been doing this for five years, and it works great. Five year old HSQ is just as good as fresh HSQ.<br>
<br>
Getting reliable deliveries from Dow-Corning is an issue, but at least we don't have to worry about shelf life anymore.</p>
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<span style="font-size:7.5pt">--------------------------------<br>
Michael Rooks <br>
Yale Institute of Nanoscience and Quantum Engineering <br>
<a href="http://nano.yale.edu" target="_blank" rel="noopener noreferrer">nano.yale.edu</a>
</span><br>
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<p class="MsoNormal">On 04/01/2019 10:08 AM, Mason Risley wrote:</p>
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<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Hi Mark,
</span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D"> </span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Thanks for mentioning about the dry HSQ, I didn’t realize that was available. Do you know if dry HSQ has a better shelf life than the standard XR1541 in MIBK?
That’s a challenge my lab is always fighting that our HSQ ends up gelling or solidifying before we use the entire bottled, I’m wondering if by prepping smaller quantities from dry HSQ as needed would be a better way to manage shelf life.
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<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D"> </span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Mason Risley</span></b></p>
<p class="MsoNormal"><i><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Process Development Engineer</span></i></p>
<p class="MsoNormal"><i><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Clair and John Bertucci Nanotechnology Laboratory
</span></i></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">5000 Forbes Street, Pittsburgh PA 15213</span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D"><a href="mailto:nanofab-staff@lists.andrew.cmu.edu" target="_blank" rel="noopener noreferrer">nanofab-staff@lists.andrew.cmu.edu</a> |
<a href="http://www.nanofab.ece.cmu.edu/" target="_blank" rel="noopener noreferrer">
http://www.nanofab.ece.cmu.edu/</a></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">ph: 412.268.5419 | cell : 505.795.4805</span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" rel="noopener noreferrer">
labnetwork-bounces@mtl.mit.edu</a> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" rel="noopener noreferrer">
<labnetwork-bounces@mtl.mit.edu></a> <b>On Behalf Of </b>Mark K Mondol<br>
<b>Sent:</b> Saturday, March 9, 2019 5:06 PM<br>
<b>To:</b> Michael Rooks <a href="mailto:michael.rooks@yale.edu" target="_blank" rel="noopener noreferrer">
<michael.rooks@yale.edu></a>; <a href="mailto:labnetwork@mtl.mit.edu" target="_blank" rel="noopener noreferrer">
labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?</span></p>
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<div>
<p class="MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif">As usual I agree with Mike, but have to chime in anyway. Applied Quantum Materials in Canada offers dry HSQ, which you mix with MIBK to make a solution. I just got some and
haven't used it yet, but others have. As it is dry you can make whatever dilution you want to achieve thicker films.</span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" rel="noopener noreferrer">
labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" rel="noopener noreferrer">labnetwork-bounces@mtl.mit.edu</a>] on behalf of Michael Rooks [<a href="mailto:michael.rooks@yale.edu" target="_blank" rel="noopener noreferrer">michael.rooks@yale.edu</a>]<br>
<b>Sent:</b> Saturday, March 09, 2019 8:50 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank" rel="noopener noreferrer">
labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?</span></p>
</div>
<div>
<p> </p>
<p>Multiple-spins seldom produce good results. It's easier to use a thicker solution of HSQ. Of course you can buy thicker HSQ, such as Fox-16, but if you are in a hurry you can thicken the 6% HSQ (well, any resist really) by bubbling nitrogen through it. Just
put a tube in the bottle and blow in some dry nitrogen. The solvent will evaporate, and the bubbles will keep the solution agitated, so a skin does not form on the surface. No need to be precise about the solution. Just keep bubbling until you get the thickness
you want.</p>
<p> </p>
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<span style="font-size:10.0pt"><br>
Michael Rooks </span><span style="font-size:7.5pt"><br>
Yale Institute for Nanoscience and Quantum Engineering <br>
nano.yale.edu </span><br>
<br>
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<p class="MsoNormal">On 3/8/2019 10:02 PM, Zhao, Mengdi wrote:</p>
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<p style="background:white"><span style="color:#212121">Hello everyone,</span></p>
<p style="background:white"><span style="color:#212121"> </span></p>
<p style="background:white"><span style="color:#212121; background:white">I am trying to spin 350nm HSQ by double coating XR1541 6% at 2000rpm and bake at 80C between coating. However, HSQ thickness measured by reflectance spectrum actually get thinner after
the second spin and bake. I wonder if the HSQ still get dissolved again during the 2nd dispense even with 80C bake for 4min after the first coating. Any suggestion on getting over 200nm HSQ spin coated on Si?</span></p>
<p style="background:white"><span style="color:#212121"> </span></p>
<p style="background:white"><span style="color:#212121; background:white">Best regards,</span></p>
<p style="background:white"><span style="color:#212121"> </span></p>
<p style="background:white"><span style="color:#212121; background:white">Mengdi</span></p>
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