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<div class="moz-cite-prefix">You should be storing HSQ in liquid
nitrogen. Check out the presentation <br>
<a class="moz-txt-link-freetext" href="https://nano.yale.edu/sites/default/files/files/hsq_frozen(1).pdf">https://nano.yale.edu/sites/default/files/files/hsq_frozen(1).pdf</a><br>
<br>
We have been doing this for five years, and it works great. Five
year old HSQ is just as good as fresh HSQ.<br>
<br>
Getting reliable deliveries from Dow-Corning is an issue, but at
least we don't have to worry about shelf life anymore.<br>
<div class="moz-signature"> <br>
<font size="-2">--------------------------------<br>
Michael Rooks <br>
Yale Institute of Nanoscience and Quantum Engineering <br>
<a href="http://nano.yale.edu">nano.yale.edu</a>
</font>
<br>
<br>
<br>
<br>
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On 04/01/2019 10:08 AM, Mason Risley wrote:<br>
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<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi
Mark,
<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thanks
for mentioning about the dry HSQ, I didn’t realize that was
available. Do you know if dry HSQ has a better shelf life
than the standard XR1541 in MIBK? That’s a challenge my lab
is always fighting that our HSQ ends up gelling or
solidifying before we use the entire bottled, I’m wondering
if by prepping smaller quantities from dry HSQ as needed
would be a better way to manage shelf life.
<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Mason
Risley</span></b><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Process
Development Engineer</span></i><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Clair
and John Bertucci Nanotechnology Laboratory
<o:p></o:p></span></i></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">5000
Forbes Street, Pittsburgh PA 15213</span><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a
moz-do-not-send="true"
href="mailto:nanofab-staff@lists.andrew.cmu.edu">nanofab-staff@lists.andrew.cmu.edu</a></span><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">
| </span><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a
moz-do-not-send="true"
href="http://www.nanofab.ece.cmu.edu/">http://www.nanofab.ece.cmu.edu/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ph:
412.268.5419 | cell : 505.795.4805</span><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1
1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span
style="font-size:11.0pt;font-family:"Calibri",sans-serif">
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a>
<b>On Behalf Of </b>Mark K Mondol<br>
<b>Sent:</b> Saturday, March 9, 2019 5:06 PM<br>
<b>To:</b> Michael Rooks <a class="moz-txt-link-rfc2396E" href="mailto:michael.rooks@yale.edu"><michael.rooks@yale.edu></a>;
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Has anyone using
thicker than 200nm HSQ for EBL patterning?<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">As
usual I agree with Mike, but have to chime in anyway.
Applied Quantum Materials in Canada offers dry HSQ, which
you mix with MIBK to make a solution. I just got some and
haven't used it yet, but others have. As it is dry you can
make whatever dilution you want to achieve thicker films.<o:p></o:p></span></p>
<div>
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align="center"><span style="color:black">
<hr align="center" size="2" width="100%">
</span></div>
<div id="divRpF646369">
<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span
style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">From:</span></b><span
style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">
<a moz-do-not-send="true"
href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
[<a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>] on behalf of Michael
Rooks [<a class="moz-txt-link-abbreviated" href="mailto:michael.rooks@yale.edu">michael.rooks@yale.edu</a>]<br>
<b>Sent:</b> Saturday, March 09, 2019 8:50 AM<br>
<b>To:</b> <a moz-do-not-send="true"
href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Has anyone using
thicker than 200nm HSQ for EBL patterning?</span><span
style="color:black"><o:p></o:p></span></p>
</div>
<div>
<p><span style="color:black"><o:p> </o:p></span></p>
<p><span style="color:black">Multiple-spins seldom produce
good results. It's easier to use a thicker solution of
HSQ. Of course you can buy thicker HSQ, such as
Fox-16, but if you are in a hurry you can thicken the
6% HSQ (well, any resist really) by bubbling nitrogen
through it. Just put a tube in the bottle and blow in
some dry nitrogen. The solvent will evaporate, and the
bubbles will keep the solution agitated, so a skin
does not form on the surface. No need to be precise
about the solution. Just keep bubbling until you get
the thickness you want.<o:p></o:p></span></p>
<p><span style="color:black"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span
style="color:black">------------------------------------
</span><span style="font-size:10.0pt;color:black"><br>
Michael Rooks </span><span
style="font-size:7.5pt;color:black"><br>
Yale Institute for Nanoscience and Quantum
Engineering <br>
nano.yale.edu </span><span style="color:black"><br>
<br>
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="color:black">On
3/8/2019 10:02 PM, Zhao, Mengdi wrote:<o:p></o:p></span></p>
</div>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<div>
<p style="background:white"><span
style="color:#212121">Hello everyone,<o:p></o:p></span></p>
<p style="background:white"><span
style="color:#212121"><o:p> </o:p></span></p>
<p style="background:white"><span
style="color:#212121;background:white">I am trying
to spin 350nm HSQ by double coating XR1541 6% at
2000rpm and bake at 80C between coating. However,
HSQ thickness measured by reflectance spectrum
actually get thinner after the second spin and
bake. I wonder if the HSQ still get dissolved
again during the 2nd dispense even with 80C bake
for 4min after the first coating. Any suggestion
on getting over 200nm HSQ spin coated on Si?</span><span
style="color:#212121"><o:p></o:p></span></p>
<p style="background:white"><span
style="color:#212121"><o:p> </o:p></span></p>
<p style="background:white"><span
style="color:#212121;background:white">Best
regards,</span><span style="color:#212121"><o:p></o:p></span></p>
<p style="background:white"><span
style="color:#212121"><o:p> </o:p></span></p>
<p style="background:white"><span
style="color:#212121;background:white">Mengdi</span><span
style="color:#212121"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
</div>
<p class="MsoNormal"><span style="color:black"><br>
<br>
<o:p></o:p></span></p>
<pre><span style="color:black">_______________________________________________<o:p></o:p></span></pre>
<pre><span style="color:black">labnetwork mailing list<o:p></o:p></span></pre>
<pre><span style="color:black"><a moz-do-not-send="true" href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><o:p></o:p></span></pre>
<pre><span style="color:black"><a moz-do-not-send="true" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></span></pre>
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