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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Mark,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thanks for mentioning about the dry HSQ, I didn’t realize that was available. Do you know if dry HSQ has a better shelf life than the standard XR1541 in MIBK?
That’s a challenge my lab is always fighting that our HSQ ends up gelling or solidifying before we use the entire bottled, I’m wondering if by prepping smaller quantities from dry HSQ as needed would be a better way to manage shelf life.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Mason Risley</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Process Development Engineer</span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Clair and John Bertucci Nanotechnology Laboratory
<o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">5000 Forbes Street, Pittsburgh PA 15213</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="mailto:nanofab-staff@lists.andrew.cmu.edu">nanofab-staff@lists.andrew.cmu.edu</a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">
| </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="http://www.nanofab.ece.cmu.edu/">http://www.nanofab.ece.cmu.edu/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ph: 412.268.5419 | cell : 505.795.4805</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Mark K Mondol<br>
<b>Sent:</b> Saturday, March 9, 2019 5:06 PM<br>
<b>To:</b> Michael Rooks <michael.rooks@yale.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">As usual I agree with Mike, but have to chime in anyway. Applied Quantum Materials in Canada offers dry HSQ, which you mix with MIBK to make a solution. I just got
some and haven't used it yet, but others have. As it is dry you can make whatever dilution you want to achieve thicker films.<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [labnetwork-bounces@mtl.mit.edu] on behalf of Michael Rooks [michael.rooks@yale.edu]<br>
<b>Sent:</b> Saturday, March 09, 2019 8:50 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?</span><span style="color:black"><o:p></o:p></span></p>
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<p><span style="color:black"><o:p> </o:p></span></p>
<p><span style="color:black">Multiple-spins seldom produce good results. It's easier to use a thicker solution of HSQ. Of course you can buy thicker HSQ, such as Fox-16, but if you are in a hurry you can thicken the 6% HSQ (well, any resist really) by bubbling
nitrogen through it. Just put a tube in the bottle and blow in some dry nitrogen. The solvent will evaporate, and the bubbles will keep the solution agitated, so a skin does not form on the surface. No need to be precise about the solution. Just keep bubbling
until you get the thickness you want.<o:p></o:p></span></p>
<p><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="color:black">------------------------------------
</span><span style="font-size:10.0pt;color:black"><br>
Michael Rooks </span><span style="font-size:7.5pt;color:black"><br>
Yale Institute for Nanoscience and Quantum Engineering <br>
nano.yale.edu </span><span style="color:black"><br>
<br>
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">On 3/8/2019 10:02 PM, Zhao, Mengdi wrote:<o:p></o:p></span></p>
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<p style="background:white"><span style="color:#212121">Hello everyone,<o:p></o:p></span></p>
<p style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p style="background:white"><span style="color:#212121;background:white">I am trying to spin 350nm HSQ by double coating XR1541 6% at 2000rpm and bake at 80C between coating. However, HSQ thickness measured by reflectance spectrum actually get thinner after
the second spin and bake. I wonder if the HSQ still get dissolved again during the 2nd dispense even with 80C bake for 4min after the first coating. Any suggestion on getting over 200nm HSQ spin coated on Si?</span><span style="color:#212121"><o:p></o:p></span></p>
<p style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p style="background:white"><span style="color:#212121;background:white">Best regards,</span><span style="color:#212121"><o:p></o:p></span></p>
<p style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p style="background:white"><span style="color:#212121;background:white">Mengdi</span><span style="color:#212121"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<pre><span style="color:black">_______________________________________________<o:p></o:p></span></pre>
<pre><span style="color:black">labnetwork mailing list<o:p></o:p></span></pre>
<pre><span style="color:black"><a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><o:p></o:p></span></pre>
<pre><span style="color:black"><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></span></pre>
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