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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Hi Srinivasa,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">In the past we have been using alumina wafer carrier [1-2mm] to proceed with cleaning of RIE and DRIE.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">You can also use standard wafer with a photoresist or certain coating (SiO2, Cr…) to avoid wafer consumption. It should be fine with the helium backside cooling.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR">Best regards, Bien cordialement,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR">Fabien Dauzou (Jr. Eng.)<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">R&D Process Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><a href="mailto:fabien@edgehogtech.com"><span style="color:#0563C1">fabien@edgehogtech.com</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Mob: 438-868-1657<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><a href="https://www.edgehogtech.com/"><span style="color:#0563C1">https://www.edgehogtech.com/</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><img border="0" width="157" height="89" style="width:1.6388in;height:.9305in" id="Picture_x0020_4" src="cid:image002.png@01D4EABC.F20322B0"><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt">780 Av. Brewster, Montreal, QC, Canada, H4C 2K1<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;color:#00B050">Think green, before printing this email.</span><span lang="EN-US" style="font-size:8.0pt;color:#00B050"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Srinivasa Reddy<br>
<b>Sent:</b> April 4, 2019 1:42 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Wafer specification requirement for RIE & DRIE cleaning recopies<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">HI,<o:p></o:p></p>
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<p class="MsoNormal">I'm Srinivasa Reddy, Manger, Microfabrication Lab, Indian Institute of Technology, Madras, Chennai.<o:p></o:p></p>
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<p class="MsoNormal">This is regarding Wafers specifications for Dummy wafers for RIE & DRIE process.<o:p></o:p></p>
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<p class="MsoNormal">1. Some times we stick <b>small prices</b> to f<b>ull 4 inch wafer</b> and do the etching process.<o:p></o:p></p>
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<p class="MsoNormal">Currently we are using <b>Prime Wafers</b> ( which costly) and I'm looking to replace with Mechanical grade or Test grade wafers. <o:p></o:p></p>
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<p class="MsoNormal">2. We also do chamber cleaning runs with the wafers and this also consumes significant number of wafers. Here also want to replace the Prime wafer with Test or Mechanical grade wafer.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I've doubt about the Bending/Warping or TTV or backside roughness of the wafer and It may lead to higher helium leak rate and process may abort.<o:p></o:p></p>
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<p class="MsoNormal">Could some one throw light on this issue<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Thanks & Regards<o:p></o:p></p>
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<p class="MsoNormal">Srinivasa Reddy Kuppireddi<o:p></o:p></p>
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<p class="MsoNormal">Project Manager <o:p></o:p></p>
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<p class="MsoNormal">Center for NEMS & Nano Photonics (CNNP)<o:p></o:p></p>
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<p class="MsoNormal">ESB 225, Dept. of Electrical Engineering<o:p></o:p></p>
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<p class="MsoNormal">Indian Institute of Technology(IIT) Madras<o:p></o:p></p>
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<p class="MsoNormal">Chennai-600036, Indian<o:p></o:p></p>
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<p class="MsoNormal">+91 44 2257 5493 (O)<o:p></o:p></p>
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<p class="MsoNormal">+91 789 326 8010(M)<o:p></o:p></p>
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