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<p style="margin-top:0;margin-bottom:0">Sometimes we will run the sample in our anneal furnace with O2 flowing if extra transparency and lower resistivity is needed.</p>
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<p>Cheers!</p>
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<p>Julia Aebersold, Ph.D.</p>
<p>MNTC Cleanroom Manager</p>
<p>University of Louisville</p>
<p>2210 South Brook Street</p>
<p>Shumaker Research Building, Room 233</p>
<p>Louisville, KY 40292</p>
<p>(502) 852-1572</p>
<p><a tabindex="0" href="http://louisville.edu/micronano" id="LPNoLP">http://louisville.edu/micronano/</a></p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Brent Gila <bgila@ufl.edu><br>
<b>Sent:</b> Tuesday, April 9, 2019 4:14:20 PM<br>
<b>To:</b> Iulian Codreanu<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] ITO deposition</font>
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<div class="PlainText">Hello Iulian,<br>
<br>
We have sputtered ITO here in our multi-user sputter tool without any <br>
indium or tin issues. However, there are some tricks to controlling the <br>
conductivity of the sputtered ITO and that involves dialing in just the <br>
right amount of O2 background in the system. We would load the ITO <br>
target overnight and run the dep first thing the following morning to <br>
ensure a low O2 and H2O background. Our tool is a KJL CMS 18 sputter <br>
tool and KJL was helpful in providing some starting points with the <br>
recipe. We had to still tweak the recipe, but that is not uncommon.<br>
<br>
Best Regards,<br>
Brent<br>
-- <br>
Brent P. Gila, PhD.<br>
Director, Nanoscale Research Facility<br>
1041 Center Drive<br>
University of Florida<br>
Gainesville, Florida 32611<br>
Tel:352-273-2245<br>
Fax:352-846-2877<br>
email:bgila@ufl.edu<br>
<br>
<br>
<br>
<br>
On 4/9/2019 12:54 PM, Iulian Codreanu wrote:<br>
> Dear Colleagues,<br>
><br>
> We have received a number of requests to provide ITO deposition <br>
> capabilities. We have a sputterer but are concerned with the low <br>
> melting points for Indium and Tin. I am under the impression that ITO <br>
> needs a dedicated deposition system. What is your experience/advice?<br>
><br>
> Thank you,<br>
><br>
> Iulian<br>
><br>
<br>
<br>
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