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<p>Hi Christian,</p>
<p>We use gas panels from Applied Energy Systems for our process
gases (incl. CF4, O2, Ar). We have manual panels with N2 purge
circuits to avoid contamination during cylinder exchanges. It has
worked well for us so far!</p>
<p>Thanks,<br>
Nathanael<br>
</p>
<div class="moz-cite-prefix">On 2019-05-01 7:27 a.m., Christian
Pfluegl wrote:<br>
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<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are installing a RIE system with the
following gases: CF4, O2, Ar.<o:p></o:p></p>
<p class="MsoNormal">I was hoping to get some advice on the gas
panels for those gases. We are planning on only buying
single-stage regulators for all the gas lines.<o:p></o:p></p>
<p class="MsoNormal">Are single stage regulators sufficient for
this or do you recommend to add purge circuits or other
features to avoid contamination of the gas lines during
maintenance (e.g. cylinder exchange).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Christian<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dr. Christian Pfluegl<o:p></o:p></p>
<p class="MsoNormal">Pendar Technologies LLC<o:p></o:p></p>
<p class="MsoNormal">tel.: (857) 413-9339<o:p></o:p></p>
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