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<p class="MsoNormal"><span style="color:#1F497D">We also have gas panels from AES for our non-cabineted gases that allow for purging during cylinder changes. We also have their cabinets for the nasty ones, too. Great people to work with and very nice.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Julia Aebersold<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(502) 852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://louisville.edu/micronano/"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="color:windowtext">From:</span></b><span style="color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Nathanael Sieb<br>
<b>Sent:</b> Wednesday, May 1, 2019 4:31 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] gas installation<o:p></o:p></span></p>
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<p>Hi Christian,<o:p></o:p></p>
<p>We use gas panels from Applied Energy Systems for our process gases (incl. CF4, O2, Ar). We have manual panels with N2 purge circuits to avoid contamination during cylinder exchanges. It has worked well for us so far!<o:p></o:p></p>
<p>Thanks,<br>
Nathanael<o:p></o:p></p>
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<p class="MsoNormal">On 2019-05-01 7:27 a.m., Christian Pfluegl wrote:<o:p></o:p></p>
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<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">We are installing a RIE system with the following gases: CF4, O2, Ar.<o:p></o:p></p>
<p class="MsoNormal">I was hoping to get some advice on the gas panels for those gases. We are planning on only buying single-stage regulators for all the gas lines.<o:p></o:p></p>
<p class="MsoNormal">Are single stage regulators sufficient for this or do you recommend to add purge circuits or other features to avoid contamination of the gas lines during maintenance (e.g. cylinder exchange).<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Christian<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Dr. Christian Pfluegl<o:p></o:p></p>
<p class="MsoNormal">Pendar Technologies LLC<o:p></o:p></p>
<p class="MsoNormal">tel.: (857) 413-9339<o:p></o:p></p>
<p class="MsoNormal"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.pendartechnologies.com_&d=DwMF-g&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=l9C3cuOkWyGd6C0ye_FDTBHMFl4lPXPJztVHQPL_Bao&m=DBcptvjr9cm2D2tplNVNY51OR3i_XyRLDIWZNQBVb-U&s=lTxxAmq7TUjOlq4BxBhBgzpoJR630TWZKNZGZiyT8Ow&e=">www.pendartechnologies.com</a><o:p></o:p></p>
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<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
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<p class="MsoNormal"><strong><span style="font-size:12.0pt;font-family:"Arial",sans-serif">Nathanael Sieb</span></strong><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Director of Operations and Administration</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
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