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<p style="margin-top:0;margin-bottom:0">Christian, </p>
<p style="margin-top:0;margin-bottom:0"> You can use single stage regulators for this. Please see me the next time you are at Harvard and I will explain how to set this up.</p>
<p style="margin-top:0;margin-bottom:0"> Steve Paolini</p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Christian Pfluegl <pfluegl@pendar.tech><br>
<b>Sent:</b> Wednesday, May 1, 2019 11:27 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] gas installation</font>
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<p class="x_MsoNormal">Hi all,</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">We are installing a RIE system with the following gases: CF4, O2, Ar.</p>
<p class="x_MsoNormal">I was hoping to get some advice on the gas panels for those gases. We are planning on only buying single-stage regulators for all the gas lines.</p>
<p class="x_MsoNormal">Are single stage regulators sufficient for this or do you recommend to add purge circuits or other features to avoid contamination of the gas lines during maintenance (e.g. cylinder exchange).</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">Thanks,</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">Christian</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">Dr. Christian Pfluegl</p>
<p class="x_MsoNormal">Pendar Technologies LLC</p>
<p class="x_MsoNormal">tel.: (857) 413-9339</p>
<p class="x_MsoNormal"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.pendartechnologies.com_&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=qbvYD5vjciEUfSff_xbrCFv8vM0-4l9C-NDweGBOTWc&s=N-2e0C8z-_UbvZLJuhxImlv1LpVNrQV9YzrjV1Z8SbI&e=" id="LPlnk888270" class="OWAAutoLink" previewremoved="true">www.pendartechnologies.com</a></p>
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