<div dir="ltr"><div dir="ltr"><div>Hi Kurt,</div><div><br></div><div>One alternative might be KMPR. It's sort of a next generation SU-8 (also by MicroChem/IBM), that may not have the same contamination issues. It is highly selective in fluorine plasma etches like SU-8, can be spread thick (I've done >100um for fused quartz etching), and also has a special solvent designed to make stripping much more easy than SU-8. It's a negative epoxy based resist (also like SU-8).</div><div><br></div><div>Draw backs are that it's quite expensive, and you should store it in a freezer so it keeps for up to a year. One way to deal with this is buy a bunch of single use syringes, fill them with the KMPR, and freeze the syringes. If you're dealing with users, that also makes it easier to sell it by the syringe. <br></div><div><br></div><div>Regards,</div><div><br></div><div>Chris Raum<br></div><div>--<br>R&D Engineer 3<br>Experimental Cosmology Group<br>Radio Astronomy Lab<br>University of California, Berkeley<br>151 LeConte Hall<br>Berkeley, CA, <br>Email: <a href="mailto:crraum@gmail.com">crraum@gmail.com</a><br>Alt Email: <a href="mailto:craum@berkeley.edu">craum@berkeley.edu</a><br></div></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Tue, May 7, 2019 at 2:26 PM Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<p class="MsoNormal">Labnetwork - <u></u><u></u></p>
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<p class="MsoNormal">We have been asked to allow SU-8 in our DRIE. I am reluctant to do so because of reports I have read that SU-8 contaminates ICP etch chambers worse than regular photoresist and it can produce antimony contaminants on the surface from the
SU-8.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Do any of you have experience in allowing SU-8 in your DRIE or denying it? What was your decision based on?<u></u><u></u></p>
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<p class="MsoNormal">Thank you for your help.<u></u><u></u></p>
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<p class="gmail-m_-46873329778406390MsoListParagraph"><u></u><span>-<span style="font:7pt "Times New Roman"">
</span></span><u></u>Kurt<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">---------------------------------------------------<u></u><u></u></p>
<p class="MsoNormal">Kurt Kupcho<u></u><u></u></p>
<p class="MsoNormal">Process Engineer/Safety Officer<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">NFC<u></u><u></u></p>
<p class="MsoNormal">1550 Engineering Drive<u></u><u></u></p>
<p class="MsoNormal">ECB Room 3110<u></u><u></u></p>
<p class="MsoNormal">Madison, WI 53706<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">E: <a href="mailto:kurt.kupcho@wisc.edu" target="_blank">kurt.kupcho@wisc.edu</a><u></u><u></u></p>
<p class="MsoNormal">T: 608-262-2982<u></u><u></u></p>
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