<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
</head>
<body dir="auto">
<div dir="ltr"></div>
<div dir="ltr">Dear Srinivasa,</div>
<div dir="ltr">I did SiOx liftoff with resist in a regular PECVD system keeping the electrode temperature to 90-100 deg C. Higher temperature will hardbake the resist and makes liftoff difficult to impossible. ICP CBD will allow you to get better oxide at 100
degrees than with PECVD.</div>
<div dir="ltr">About contamination we haven’t looked at this but the system is cleaned every week so I don’t believe this is a concern.</div>
<div dir="ltr">Regards </div>
<div dir="ltr">Fouad Karouta </div>
<div dir="ltr">ANU - ANFF ACT node</div>
<div dir="ltr">Canberra, Australia </div>
<div dir="ltr"><br>
On 9 May 2019, at 8:45 am, Srinivasa Reddy <<a href="mailto:sreevyas@gmail.com">sreevyas@gmail.com</a>> wrote:<br>
<br>
</div>
<blockquote type="cite">
<div dir="ltr">
<div dir="ltr">Dear Researchers,
<div><span style="font-family:arial,sans-serif;font-size:12.8px">I want to use ICP PECVD facility for depositing silicon dioxide on patterned </span><b style="font-family:arial,sans-serif;font-size:12.8px">photoresist sample</b><span style="font-family:arial,sans-serif;font-size:12.8px">.</span></div>
<div><span style="font-family:arial,sans-serif;font-size:12.8px">Finally lift-off the SiO2, The sample consist of gold patterns upon glass substrate. </span></div>
<div><font face="arial, sans-serif"><span style="font-size:12.8px">We have only one ICP CVD Unit, which mostly used for semiconductor and GaN device passivation layers along with some other MEMS process.</span></font></div>
<div><font face="arial, sans-serif"><span style="font-size:12.8px"><br>
</span></font></div>
<div><font face="arial, sans-serif"><span style="font-size:12.8px">I suspect the Photoresist may contaminate the chamber and also getting lift may not be possible after subjecting to ICP & RF powers.</span></font></div>
<div><font face="arial, sans-serif"><span style="font-size:12.8px"><br>
</span></font></div>
<div><font face="arial, sans-serif"><span style="font-size:12.8px">I request experts to throw some light on this process feasibility and your experience.</span></font></div>
<div><font face="arial, sans-serif"><span style="font-size:12.8px"><br>
</span></font></div>
<div><font face="arial, sans-serif"><span style="font-size:12.8px"><br clear="all">
</span></font>
<div>
<div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature">
<div dir="ltr">
<div>
<div dir="ltr">
<div>
<div dir="ltr">
<div>Thanks & Regards</div>
<div>Srinivasa Reddy Kuppireddi<br>
</div>
<div>Project Manager </div>
<div>Center for NEMS & Nano Photonics (CNNP)</div>
<div>ESB 225, Dept. of Electrical Engineering</div>
<div>Indian Institute of Technology(IIT) Madras</div>
<div>Chennai-600036, Indian</div>
<div>+91 44 2257 5493 (O)</div>
<div>+91 789 326 8010(M)</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</blockquote>
<blockquote type="cite">
<div dir="ltr"><span>_______________________________________________</span><br>
<span>labnetwork mailing list</span><br>
<span><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a></span><br>
<span><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a></span><br>
</div>
</blockquote>
</body>
</html>