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<p style="margin-top:0;margin-bottom:0">We have some experience with RuO2 sputtering at Southampton, one user was interested but never had the time to conduct a full optimisation of the sputtering. I recall that pressure was significant in obtaining good enough
adhesion to the substrate, which was possibly Pt<br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Vlahakis, James <James.Vlahakis@tufts.edu><br>
<b>Sent:</b> 10 May 2019 19:52:20<br>
<b>To:</b> 'labnetwork@mtl.mit.edu'<br>
<b>Subject:</b> [labnetwork] sputter materials - Ru & Bi</font>
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<!--
@font-face
{font-family:Wingdings}
@font-face
{font-family:"Cambria Math"}
@font-face
{font-family:Calibri}
p.x_MsoNormal, li.x_MsoNormal, div.x_MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif}
a:link, span.x_MsoHyperlink
{color:#0563C1;
text-decoration:underline}
a:visited, span.x_MsoHyperlinkFollowed
{color:#954F72;
text-decoration:underline}
p.x_MsoListParagraph, li.x_MsoListParagraph, div.x_MsoListParagraph
{margin-top:0in;
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margin-bottom:0in;
margin-left:.5in;
margin-bottom:.0001pt;
font-size:11.0pt;
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span.x_EmailStyle17
{font-family:"Calibri",sans-serif;
color:windowtext}
.x_MsoChpDefault
{font-family:"Calibri",sans-serif}
@page WordSection1
{margin:1.0in 1.0in 1.0in 1.0in}
div.x_WordSection1
{}
ol
{margin-bottom:0in}
ul
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-->
</style>
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<p class="x_MsoNormal">Hi everyone, one of our users is interested in sputtering materials we are unfamiliar with – bismuth and ruthenium. They would be used in our “dirty” sputter tool, which has few material restrictions and users deposit on a variety substrates
-</p>
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<p class="x_MsoNormal">Easy or difficult to sputter? Any hazards to consider? Contamination issues? Any info would be greatly appreciated</p>
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<p class="x_MsoNormal">Thanks</p>
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<p class="x_MsoNormal">jim</p>
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