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<p class="MsoNormal">Hello all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have the manual for step height calibration for the Tencor P2 contact profiler? We tried contacting KLA Tencor tech support, so far they have only been able to provide us the instructions for Step width calibration.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Any help will be greatly appreciated!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Greshma<o:p></o:p></p>
<p class="MsoNormal">----<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Greshma Nair, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Nanofabrication Facility (NFF)<o:p></o:p></p>
<p class="MsoNormal" style="background:white">Center for Advanced Microstructures and Devices (CAMD)<span style="font-size:12.0pt"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white">6980 Jefferson Highway<span style="font-size:12.0pt"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white">Baton Rouge, LA 70806<o:p></o:p></p>
<p class="MsoNormal">Phone: <span style="font-size:10.5pt;color:black;background:white">
(225) 578-9378<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://lsu.edu/nanofabrication">lsu.edu/nanofabrication</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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