<div dir="ltr"><div dir="ltr"><span style="font-family:arial,sans-serif"><font size="2">Hi Steve and Mac,</font></span></div><div dir="ltr"><span style="font-family:arial,sans-serif"><font size="2"><br></font></span></div><div><span style="font-family:arial,sans-serif"><font size="2">Thanks for the quick response to Tom's question (and thanks Tom!). <br></font></span></div><div><span style="font-family:arial,sans-serif"><font size="2"><br></font></span></div><div><span style="font-family:arial,sans-serif"><font size="2">We are trying to etch 18nm of Ni on a 4-in silicon wafer that has a polymer mask to define the areas from which we want to remove the Ni. The mask is a UV-cured polymer, and I was also wondering if you have a feel for the relative rates of removal of the Ni vs the polymer mask.</font></span></div><div><span style="font-family:arial,sans-serif"><font size="2"><br></font></span></div><div><span style="font-family:arial,sans-serif"><font size="2">Much thanks in advance--Dennis<br></font></span></div><div dir="ltr"><font face="Times New Roman, Times, serif"><br></font></div><div dir="ltr"><font face="Times New Roman, Times, serif"><br></font></div><div dir="ltr"><font face="Times New Roman, Times, serif"><br></font></div><div dir="ltr"><font face="Times New Roman, Times, serif"><br></font></div><div dir="ltr"><font face="Times New Roman, Times, serif"><br></font></div><div dir="ltr"><font face="Times New Roman, Times, serif"><br></font></div><div dir="ltr"><font face="Times New Roman, Times, serif">+++++++++++++++++</font></div><div dir="ltr"><font face="Times New Roman, Times, serif"><br></font></div><div dir="ltr"><font face="Times New Roman, Times, serif">Hi Tom,<br>
<br>
At Harvard, we have an ion beam etcher. What is the material to be etched?<br>
<br>
<br>
Mac<br>
<br>
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<p class="MsoNormal" style="margin-bottom:0.0001pt"><span>Mac Hathaway</span></p>
<p class="MsoNormal" style="margin-bottom:0.0001pt"><span>Senior Process and Systems Engineer</span></p>
<p class="MsoNormal" style="margin-bottom:0.0001pt"><span>Harvard Center for
<span class="m_-4065585145127433001gmail-m_-5015313915084508844SpellE">Nanoscale</span> Systems</span></p>
<p class="MsoNormal" style="margin-bottom:0.0001pt"><span>11 Oxford St.</span></p>
<p class="MsoNormal" style="margin-bottom:0.0001pt"><span>Cambridge, MA<span>
</span>02138</span></p>
<p class="MsoNormal" style="margin-bottom:0.0001pt"><span>617-495-9012</span></p></div></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, May 22, 2019 at 4:18 PM Paolini, Steven <<a href="mailto:spaolini@cns.fas.harvard.edu" target="_blank">spaolini@cns.fas.harvard.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<p class="MsoNormal">We got one! Has Ar and O2 milling capability. Have him contact me.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<div>
<p class="MsoNormal"><span style="font-size:14pt">Steve Paolini<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">Principal Equipment Engineer<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">Harvard University Center for Nanoscale Systems<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">11 Oxford St.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">Cambridge, MA 02138<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt">617- 496- 9816<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt"><a href="mailto:spaolini@cns.fas.harvard.edu" target="_blank">spaolini@cns.fas.harvard.edu</a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:14pt"><a href="http://www.cns.fas.harvard.edu" target="_blank">www.cns.fas.harvard.edu</a></span><span style="font-size:14pt"><u></u><u></u></span></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<div style="border-color:rgb(225,225,225) currentcolor currentcolor;border-style:solid none none;border-width:1pt medium medium;padding:3pt 0in 0in">
<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Ferraguto, Thomas S<br>
<b>Sent:</b> Wednesday, May 22, 2019 11:47 AM<br>
<b>To:</b> '<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>' <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br>
<b>Cc:</b> Dennis Work <<a href="mailto:dennis.slafer@microcontinuum.com" target="_blank">dennis.slafer@microcontinuum.com</a>><br>
<b>Subject:</b> [labnetwork] Ion Milling<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Colleagues,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">I have a customer that needs dry etch 18nm. We can’t use our ICP for the process. Does anyone have an Ion Mill Tool that could provide him the service.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Regards<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Tom Ferraguto<u></u><u></u></p>
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</blockquote></div><br clear="all"><br>-- <br><div dir="ltr" class="m_-4065585145127433001m_-1735194286705532015gmail_signature"><div dir="ltr">Dr. W. Dennis Slafer<br><br>President & CTO<br>MicroContinuum, Inc.<br><a href="http://www.microcontinuum.com" target="_blank">www.microcontinuum.com</a><br>57 Smith Place<br>Cambridge, MA 02138<br><br>o: 617.354.1092<br>c: 781.635.7032<br>f: 617.354.1107<br><a href="mailto:dennis.slafer@microcontinuum.com" target="_blank">dennis.slafer@microcontinuum.com</a></div></div></div>