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<p class="MsoNormal"><span style="color:#1F497D">Thanks Tony, I like the 3 degree slot<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> Tony L Olsen [mailto:tony.olsen@utah.edu] <br>
<b>Sent:</b> Friday, May 31, 2019 12:16 PM<br>
<b>To:</b> Morrison, Richard H., Jr <rmorrison@draper.com>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> RE: furnace boat question<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">In industry, we used to scribe our quartz frequently. Don’t remember any resulting cracks. However, over time the scribe fades due to growths, depositions, and cleaning. Best long-term option was to have the quartz vendor add text with
a small bead of quartz. But, both of those options are useless if people won’t look. Better, but still not fool-proof, would be to find a way to mate a specific boat to a specific tube/cantilever – although this adds complexity and increases inventory needs.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">If you use different slot width’s for the same diameter wafer, you might want to consider using only the largest slot width, but cut the slots at a 3 degree angle. This forces all wafers to lean uniformly and can accommodate different
wafer thicknesses with the same slot.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">tonyO<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Tony Olsen<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Nanofab Cleanroom Supervisor/Process Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Utah<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">36 S Wasatch Dr, Suite 2500<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Salt Lake City, UT 84112<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">801-587-0651 office<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">801-587-3077 fax<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.nanofab.utah.edu/"><span style="color:#6666CC">www.nanofab.utah.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> Morrison, Richard H., Jr <<a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a>>
<br>
<b>Sent:</b> Friday, May 31, 2019 07:57<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] furnace boat question<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">HI Everyone,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are having an issue controlling the quartz boats for our furnace operations. We use 4” and 6” boats with 2 different slot widths. DO you think we could lightly scribe a tube number and size on the rail of the boat? I am concerned that
it would crack.<o:p></o:p></p>
<p class="MsoNormal"><br>
Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard H. Morrison<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Draper<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge, MA<o:p></o:p></p>
<p class="MsoNormal">02139-3573<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Work 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">Cell 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to
this email and immediately destroy all copies of this email. <o:p></o:p></p>
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Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately
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