<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto">Hello Jim,<div> </div><div>The Gold - Cr2O3 adherence test you had done applying enough pressure with</div><div>a swab was very conclusive, and this problem has to be addressed indeed.</div><div><br></div><div>I think there are some constraints for heating up a mask plate.</div><div>First Cr itself might get Sinter like alloyed with the Glass/Quartz plate, resulting </div><div>a rough top surface (pinholes too) for such a thin 1000A film: as the metal</div><div>is “suck” like in the substrate. The lines edges might get affected.</div><div>All these for 15 min at ~ 400-500C : actually it depends on the “Temperature-Time</div><div>budget” </div><div>Au, Cu, Cr, Fe diffuse very fast in Silicon based materials; TiN blocks them/ see</div><div>the Damascene process.</div><div></div><div>Very possible that Au to significantly diffuse in Cr2O3, or other thermal assisted </div><div>enhanced adherence reaction.</div><div>You could try to use RTA. </div><div><br></div><div>Second is the mask plate flatness issue.</div><div>The Glass plate is safe limited to ~ 490C to minimize the plastic-gravity deformation.</div><div>The plate bending due to the metal stress and metal-Glass expansion coefficient </div><div>mismatch might not be a problem as the metal is very thin and is not continuous</div><div>being patterned.</div><div><br></div><div>Also possible you might think of depositing in-situ Cr & Au, or Cr2O3-Au and see</div><div>how it goes cold or after anneal.</div><div><br></div><div>Success!</div><div>Bernard</div><div><br></div><div><br></div><div><br><br><div id="AppleMailSignature">Sent from my iPad</div><div><br>On Jun 3, 2019, at 5:01 PM, Jim Carroll <<a href="mailto:jim@photomaskportal.com">jim@photomaskportal.com</a>> wrote:<br><br></div><blockquote type="cite"><div><div dir="ltr"><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000000">Hi Greg,</div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000000"><br></div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000000">Thanks, that sounds like a viable option. In this specific case, since we already have patterned chrome masks, we're going to try the "“Reverse-side exposure Lift-Off” process mentioned by Andrei near the beginning of the thread, plus the addition of an anneal step to punch through the oxide layer and improve adhesion.</div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000000"><br></div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000000">Thanks,<br></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div><div><font size="2" face="verdana, sans-serif"><font color="#000000">Jim Carroll<br></font><b style="color:rgb(0,0,0)">PhotomaskPORTAL</b><font color="#000000"><br></font></font></div><div><font color="#000000"><font size="2" face="verdana, sans-serif"><i>We help you make masks</i><br><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice"><span title="Call with Google Voice">(415) 448-6275</span></span></span></span></span></span></span></span></span></span></span></span></font></font></div><div></div></div><div><ul style="margin:0px;padding:0px 0px 8px;border:0px;outline:0px;font-size:11.818181991577148px;font-family:Helvetica,Arial,sans-serif;vertical-align:baseline;list-style:none;line-height:16.988636016845703px;display:table-cell;width:502.7272644042969px"><li style="margin:0px;padding:8px 12px 2px 0px;border:0px;outline:0px;font-style:inherit;font-size:11px;font-family:inherit;vertical-align:baseline;font-variant:inherit;line-height:1.2em"><dl style="margin:0px;padding:0px;border:0px;outline:0px;font-style:inherit;font-size:10.909090995788574px;font-family:inherit;vertical-align:baseline;font-variant:inherit;line-height:inherit;word-wrap:break-word"><a href="http://www.photomaskportal.com" target="_blank"><dl style="margin:0px;padding:0px;border:0px;outline:0px;font-style:inherit;font-size:10.909090995788574px;font-family:inherit;vertical-align:baseline;font-variant:inherit;line-height:inherit;word-wrap:break-word"><img src="http://www.photomaskportal.com/uploads/1/1/6/1/11617247/9425470.png" width="200" height="56"><br></dl></a></dl></li></ul></div></div></div></div></div></div></div><br></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Mon, Jun 3, 2019 at 2:49 PM Greg Allion <<a href="mailto:grallion@ncsu.edu">grallion@ncsu.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div dir="ltr">Maybe I'm not understanding your process correctly, but couldn't you just write the mask inverted, develop, evaporate your Au, lift-off, then Cr etch? The Au will act as a your mask then for the Ctr etch.<div>-Greg</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, May 31, 2019 at 7:37 PM Nathanael Sieb <<a href="mailto:sieb@4dlabs.ca" target="_blank">sieb@4dlabs.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
<div bgcolor="#FFFFFF">
<p>A similar interesting idea might be to use a fluoro-silane to
make a fluorinated surface in the glass areas. I've never tried
it before for this application, but it might work.<br>
</p>
<p>Thanks,</p>
<p>Nathanael<br>
</p>
<div class="gmail-m_8741139502025188439gmail-m_-4143726145614814600moz-cite-prefix">On 2019-05-31 3:40 a.m., Morrison,
Richard H., Jr wrote:<br>
</div>
<blockquote type="cite">
<div class="gmail-m_8741139502025188439gmail-m_-4143726145614814600WordSection1">
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Here’s
a crazy idea try vapor HMDS, it will react with the glass
but not the Chrome and it might help. Gold does not really
like to stick to glass how thick is the film?<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Rick<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><b><span style="font-size:11pt;font-family:Calibri,sans-serif">From:</span></b><span style="font-size:11pt;font-family:Calibri,sans-serif">
<a class="gmail-m_8741139502025188439gmail-m_-4143726145614814600moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>
[<a class="gmail-m_8741139502025188439gmail-m_-4143726145614814600moz-txt-link-freetext" href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Jim Carroll<br>
<b>Sent:</b> Thursday, May 30, 2019 4:24 PM<br>
<b>To:</b> <a class="gmail-m_8741139502025188439gmail-m_-4143726145614814600moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Gold Deposition over Chrome<u></u><u></u></span></p>
<p class="MsoNormal"><u></u> <u></u></p>
<div>
<div>
<p class="MsoNormal"><span style="font-family:Verdana,sans-serif;color:black">Dear
LabNetwork colleagues,<u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:Verdana,sans-serif;color:black"><u></u> <u></u></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:Verdana,sans-serif;color:black">We
are trying to add a thin film of gold over patterned
chrome on a standard photomask using e-beam
evaporation. We want the gold to preferentially adhere
to the chrome while lifting off the glass.<u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:Verdana,sans-serif;color:black"><br>
After a few tests, it appears that the gold sticks
equally well to both the glass and chrome. Ultrasonic
agitation and swabbing do not selectively remove the
gold from the glass while leaving it on the chrome.
Eventually, after enough pressure is applied with a
swab, the gold releases from both the glass and chrome.
<u></u><u></u></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:Verdana,sans-serif;color:black"><u></u> <u></u></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-family:Verdana,sans-serif;color:black">Does
anyone have a suggested approach?<br>
<u></u><u></u></span></p>
</div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><span style="font-size:10pt;font-family:Verdana,sans-serif;color:black">Thanks,</span><u></u><u></u></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:10pt;font-family:Verdana,sans-serif;color:black">Jim
Carroll<br>
<b>PhotomaskPORTAL</b></span><u></u><u></u></p>
</div>
<div>
<p class="MsoNormal"><i><span style="font-size:10pt;font-family:Verdana,sans-serif;color:black">We
help you make masks</span></i><span style="font-size:10pt;font-family:Verdana,sans-serif;color:black"><br>
(415) 448-6275</span><u></u><u></u></p>
</div>
</div>
<div>
<p class="MsoNormal" style="margin-left:0in;line-height:14.4pt;vertical-align:baseline">
<span style="font-size:10pt;font-family:Symbol"><span>·<span>
</span></span></span><span style="font-size:8pt"><a href="http://www.photomaskportal.com" target="_blank"><span style="border:1pt solid windowtext;padding:0in;text-decoration:none"><image001.jpg></span><br>
</a></span><span style="font-size:8.5pt"><u></u><u></u></span></p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
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<span style="font-family:arial,helvetica,sans-serif"><strong>Nathanael
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