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<p class="MsoNormal"><span style="color:#1F497D">Is this a case where a check valve at the BCl3 source failed, or was non-existent?
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Would a valve cracking pressure of 0.5 psi have prevented this unwanted backflow.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:16.0pt;font-family:"Times New Roman",serif;color:#1F497D">Scott P. Blondell<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;color:#1F497D">Facilities Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.smfl.rit.edu/" target="_blank"><span style="color:blue">Semiconductor & Microsystems Fabrication Laboratory</span></a></span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;color:#1F497D">82 Lomb Memorial Dr.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;color:#1F497D">Bldg. 17-2519<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;color:#1F497D">Rochester, NY 14623<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">585 738-4073 c<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">585 475-2171 o<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">585 475-5041 f<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="mailto:spb1699@rit.edu"><span style="color:blue">spb1699@rit.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.smfl.rit.edu"><span style="color:blue">www.smfl.rit.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:navy"><img border="0" width="90" height="60" id="Picture_x0020_1" src="cid:image001.jpg@01D5278B.D1D98A90" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:navy"><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Feargal Nolan<br>
<b>Sent:</b> Thursday, June 20, 2019 8:17 AM<br>
<b>To:</b> Rinehart, Sean <sean.rinehart@yale.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Argon in a BCl3 cylinder<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D">Hi Sean,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D">We had a similar problem with SiCl4 but in our case it was charged with nitrogen. On our system we were able to use the venturi on the gas panel to evacuate the N2 from the cylinder. We ran several
tests afterwards and we did not see any adverse effects in our process.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D">Regards<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE">Feargal Nolan<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE">Maintenance Manager<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><b><span lang="EN-IE" style="color:#6CABE7">Tyndall National Institute<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D">Lee Maltings, Dyke Parade<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D">Cork, T12 R5CP<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D">Ireland</span><span style="color:#1F497D"><br>
</span><b><span lang="EN-IE" style="color:#6CABE7">t </span></b><span lang="EN-IE" style="color:#1F497D">+353 21 234 6656</span><b><span lang="EN-IE" style="color:#6CABE7"><o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span lang="EN-IE" style="color:#6CABE7">m </span></b><span lang="EN-IE" style="color:#1F497D">+353 87 635 7673</span><span lang="EN-IE"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IE" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Rinehart, Sean<br>
<b>Sent:</b> 19 June 2019 18:15<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Argon in a BCl3 cylinder<o:p></o:p></p>
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<p class="MsoNormal"><span lang="EN-IE"><o:p> </o:p></span></p>
<p class="MsoNormal">Hello all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Recently our facility’s BCl3 cylinder had been charged with argon, increasing the delivery pressure to 25 psi. The cause has been corrected, but now I’m evaluating whether or not the cylinder needs to be replaced, and would appreciate some
advice.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Since the root issue was fixed, the pressure has slowly dropped from 25 psi to 15 psi with use. Based on this, it seems like with more use the argon should completely deplete from the cylinder, but maybe someone can tell me if that’s actually
true, and if there’s a way to evaluate gas concentrations. Additionally, the plasma glow is whitish instead of pink, so there’s definitely BCl3 content in the delivered gas.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Sean Rinehart<o:p></o:p></p>
<p class="MsoNormal">Assistant Director, Cleanroom Operations<o:p></o:p></p>
<p class="MsoNormal">Yale University<o:p></o:p></p>
<p class="MsoNormal">203 432 4303 <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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