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Sean,<br>
<br>
From a research point of view, I would see this as an
unacceptable unknown. I would strongly suggest changing out the
cylinder.<br>
<br>
Regards,<br>
<br>
Joe Palmer<br>
Operations Manager<br>
PRISM MNFL<br>
Princeton University<br>
<br>
<div class="moz-cite-prefix">On 6/19/2019 4:40 PM, Paolini, Steven
wrote:<br>
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<p class="MsoNormal">Sean,<o:p></o:p></p>
<p class="MsoNormal"> I am not entirely sure, but it’s not
likely that the gases will completely disassociate from each
other, even if the pressure drops. I’m assuming that because
the vapor pressure of BCL3 is a constant because it is a
liquid, you are determining that mostly Ar is being consumed
because of the pressure drop. I would recommend a complete
pump and purge of the entire gas circuit and replacing the
cylinder of BCL3.<o:p></o:p></p>
<p class="MsoNormal">The simplest way to evaluate the gas
concentrations is with an RGA but I don’t think it’s a good
idea to expose the filament to a corrosive such as BCL3<o:p></o:p></p>
<p class="MsoNormal"> Steve “Equipment Dood” Paolini<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal"><span style="font-size:14.0pt">Steve
Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal
Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard
University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">11 Oxford
St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Cambridge,
MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496-
9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt"><a class="moz-txt-link-abbreviated" href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt"><a class="moz-txt-link-abbreviated" href="http://www.cns.fas.harvard.edu">www.cns.fas.harvard.edu</a></span><span
style="font-size:14.0pt"><o:p></o:p></span></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1
1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b>
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a>
<b>On Behalf Of </b>Rinehart, Sean<br>
<b>Sent:</b> Wednesday, June 19, 2019 1:15 PM<br>
<b>To:</b> <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Argon in a BCl3 cylinder<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hello all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Recently our facility’s BCl3 cylinder had
been charged with argon, increasing the delivery pressure to
25 psi. The cause has been corrected, but now I’m evaluating
whether or not the cylinder needs to be replaced, and would
appreciate some advice.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Since the root issue was fixed, the
pressure has slowly dropped from 25 psi to 15 psi with use.
Based on this, it seems like with more use the argon should
completely deplete from the cylinder, but maybe someone can
tell me if that’s actually true, and if there’s a way to
evaluate gas concentrations. Additionally, the plasma glow is
whitish instead of pink, so there’s definitely BCl3 content in
the delivered gas.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Sean Rinehart<o:p></o:p></p>
<p class="MsoNormal">Assistant Director, Cleanroom Operations<o:p></o:p></p>
<p class="MsoNormal">Yale University<o:p></o:p></p>
<p class="MsoNormal">203 432 4303 <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<br>
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