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Hi Kevin,<br>
I have a manual for the NT340 controller, and in the troubleshooting
section it says that if the Failure LED is on, one of the LEDs in
the chain will be flashing to indicate the error. In this case it
looks like LED6 is on, which points to a problem with the turbo temp
being too high. Not sure if this is the same for the NT20. Maybe a
failure of the temperature switch?<br>
When you press the stop button are you in local mode? If the
controller is in remote mode, you may need to send the stop command
through the software.<br>
<pre class="moz-signature" cols="72">Eric Lim
tel.617-253-6897
fax.617-258-8500
room 39-215</pre>
<div class="moz-cite-prefix">On 7/2/2019 10:50 PM, Kevin M McPeak
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:MWHPR06MB2573E5E66B84DFFA7B6437D0B0FB0@MWHPR06MB2573.namprd06.prod.outlook.com">
<pre class="moz-quote-pre" wrap="">Dear Colleagues,
The turbo pump controller (Leybold Turbotronik NT20) on our Oxford ICP100 plasma etching tool is giving a Failure light, see attached image. I looked in the manual but all it mentions is pressing the stop button to clear the error. I tried that but the light stays red. I have also tried power cycling the machine (didn't help) and I checked all the fuses (all good there). I also reached out the Oxford and Leybold. Oxford said that it is very old and that they have limited experience. Leybold has not replied.
Does anyone on the list have experience with troubleshooting this turbo pump controller? The turbo pump itself is a Leybold 361C. I welcome tips on how best to troubleshoot this issue.
Regards,
Kevin
--
Kevin M. McPeak
Assistant Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
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