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<div class="" style="word-wrap:break-word; line-break:after-white-space">Hi Kevin,
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<div class="">Hope this helps….</div>
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<div class="">Mark<br class="">
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________________________________________________________________</div>
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Mark Weiler</div>
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Equipment & Facilites Manager</div>
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Clair and John Bertucci Nanotechnology Laboratory</div>
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Eden Hall Nanofabrication Cleanroom</div>
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Carnegie Mellon University</div>
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P: 412-268-2471</div>
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<a href="http://www.nanofab.ece.cmu.edu" class="">http://www.nanofab.ece.cmu.edu</a></div>
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<span style="font-family:Helvetica; font-size:12px; font-style:normal; font-weight:normal; letter-spacing:normal; text-align:start; text-indent:0px; text-transform:none; white-space:normal; word-spacing:0px"><span><span><span><span><span><a href="https://www.linkedin.com/in/marksbasics" class="" style="font-family:Helvetica; font-size:12px; font-style:normal; font-weight:normal; letter-spacing:normal; orphans:auto; text-align:start; text-indent:0px; text-transform:none; white-space:normal; widows:auto; word-spacing:0px"></a></span></span></span></span></span></span></div>
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<div><img src="cid:5fc8fd04-6e69-4e24-9637-7c1295b1d7ab@exchange.andrew.cmu.edu">
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<div class="">On Jul 2, 2019, at 10:50 PM, Kevin M McPeak <<a href="mailto:kmcpeak@lsu.edu" class="">kmcpeak@lsu.edu</a>> wrote:</div>
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<div class="">Dear Colleagues,<br class="">
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The turbo pump controller (Leybold Turbotronik NT20) on our Oxford ICP100 plasma etching tool is giving a Failure light, see attached image. I looked in the manual but all it mentions is pressing the stop button to clear the error. I tried that but the light
stays red. I have also tried power cycling the machine (didn't help) and I checked all the fuses (all good there). I also reached out the Oxford and Leybold. Oxford said that it is very old and that they have limited experience. Leybold has not replied.
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Does anyone on the list have experience with troubleshooting this turbo pump controller? The turbo pump itself is a Leybold 361C. I welcome tips on how best to troubleshoot this issue.
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Regards,<br class="">
Kevin <br class="">
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--<br class="">
Kevin M. McPeak<br class="">
Assistant Professor | LSU Dept. of Chemical Engineering<br class="">
225-578-0058 | <a href="http://mcpeaklab.com" class="">mcpeaklab.com</a> | <a href="http://lsu.edu/nanofabrication" class="">
lsu.edu/nanofabrication</a><br class="">
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<span id="x_cid:D6E600DC-07F1-4851-B9D0-29C2B5EA2E3E@wv.cc.cmu.edu"><LSU_turbotronik_failure.jpg></span>_______________________________________________<br class="">
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