<div dir="ltr"><div>Hi all, </div><div><br></div><div>Because of ongoing lead time and shelf life issues with Dow Corning HSQ, our centre switched to stocking <a href="https://www.aqmaterials.com/aqm-silsesquioxane-polymers">AQM SiOx</a> from <a href="https://www.aqmaterials.com/">Applied Quantum Materials</a>, which is, as far as I understand, chemically identical to standard HSQ. We purchase it in powder form, where it is reputed to have an indefinite shelf life if kept moisture-free; users mix it with anhydrous MIBK to the concentration they need, as needed.</div><div><br></div><div>We have a <a href="https://www.nanofab.ualberta.ca/2017/news/new-negative-tone-ebl-resist-in-stock-aqm-siox/">news post</a> about AQM SiOx, including some links to process results and other documentation. In a side-by-side comparison with Dow Corning HSQ, its behaviour as an EBL resist was essentially the same. Our staff have not tested its performance as an etch mask, but anecdotally, I have heard from some of our EBL users that it behaves the same as standard HSQ for chlorine-based ICPRIE of Si (e.g., for Si photonics).</div><div><br></div><div>(As a side note, Applied Quantum Materials is a spin-off company from our university's chemistry department, but they are not associated with our centre in any way.)</div><div><br></div><div>Cheers, </div><div><br></div><div> – Aaron</div><div><br></div><br clear="all"><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div><u style="font-size:x-small"> </u><span style="font-size:x-small"> </span><br></div><div><span style="font-size:12.8000001907349px"><font size="1"><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Aaron Hryciw, PhD, PEng</span></p><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Fabrication Group Manager</span><br></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">University of Alberta - nanoFAB</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4 </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Ph: 780-940-7938</span></p><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca/" style="color:rgb(17,85,204)" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"> </span></font></span><font color="#000000"><br></font><br></div></div></div></div></div></div></div></div></div></div></div></div><br></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Sep 18, 2019 at 10:00 AM Michael Rooks <<a href="mailto:michael.rooks@yale.edu">michael.rooks@yale.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<div class="gmail-m_4187726718782120525moz-cite-prefix">You'll be lucky to get any HSQ at all.
Ordering HSQ has gotten pretty bad.<br>
I made an order in June, and by this month only half of it
arrived.<br>
And Dow (now "DDP") got the address wrong again.<br>
<div class="gmail-m_4187726718782120525moz-signature"> <br>
<font size="-2">--------------------------------<br>
Michael Rooks <br>
Yale Institute of Nanoscience and Quantum Engineering <br>
<a href="http://nano.yale.edu" target="_blank">nano.yale.edu</a>
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On 09/17/2019 02:26 PM, N Shane Patrick wrote:<br>
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Hello all,
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<div>I’ve been informed by Krayden that as of September
11 the price of HSQ (XR-1541-006, 125mL) has increased to
$1801.43, which represents a massive increase from my order back
in July. I don’t know the reasons, but thought people might want
to be aware. Lead times continue to be 12 weeks or more.</div>
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<div style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px;font-style:normal;font-variant-caps:normal;font-weight:normal;letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none">N. Shane Patrick<br>
Direct Write and Stepper Lithography</div>
<div style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px;font-style:normal;font-variant-caps:normal;font-weight:normal;letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none">Research Engineer, Washington Nanofabrication
Facility (WNF) <br>
National Nanotechnology Coordinated Infrastructure
(NNCI)<br>
University of Washington<br>
Fluke Hall 129, Box 352143<br>
(206) 221-1045<br>
<a href="mailto:patricns@uw.edu" target="_blank">patricns@uw.edu</a><br>
<a href="http://www.wnf.washington.edu/" target="_blank">http://www.wnf.washington.edu/</a></div>
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