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<p>We also run ours until empty. With some of the corrosive gases
you may want to check with the vendor to make sure there is no
risk of cylinder degradation. I do believe that premix gases can
change as the gases may separate over time. They typically have
an expiry date of a few years, but we discontinued our
phosphine-silane mix several years ago.</p>
<p>Thanks,<br>
Nathanael<br>
</p>
<div class="moz-cite-prefix">On 2019-10-09 6:32 a.m., Cenk Yanik
(Alumni) wrote:<br>
</div>
<blockquote type="cite"
cite="mid:CABnZ_5c0y4sn976qrvGay6FQCQfziqYQhQURVmp1FW0sAKEtBA@mail.gmail.com">
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<div>Dear Richard,</div>
<div>Thank you for the information.</div>
<div>We follow the same procedure as you mentioned: " keeping
them on a scale" and order the new one when the weight drops
under the threshold value but for some of them it takes a
few years depending on the usage.<br>
</div>
<div><br>
</div>
</div>
<br>
<div class="gmail_quote">
<div dir="ltr" class="gmail_attr">Morrison, Richard H., Jr
<<a href="mailto:rmorrison@draper.com"
moz-do-not-send="true">rmorrison@draper.com</a>>, 9 Eki
2019 Çar, 16:08 tarihinde şunu yazdı:<br>
</div>
<blockquote class="gmail_quote" style="margin:0px 0px 0px
0.8ex;border-left:1px solid
rgb(204,204,204);padding-left:1ex">
<div lang="EN-US">
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<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)">Hi,</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)">Here
at Draper we only change the gases when they are
“empty”, by that I mean we set a bottom limit for
liquids by keeping them on a scale. For true gases
we send the bottle back empty if we can. Some time
there is just not enough gas left in the bottle to
finish a day so we would change it early.</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)">We
keep a log of all weights and pressures so we can
monitor and try to estimate when it would need to be
changed so that we have a spare on hand.</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)">Rick</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">Richard
H. Morrison</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">Principal
Member of the Technical Staff</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">Draper</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">555
Technology Square</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">Cambridge,
MA</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">02139-3573</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">Work
617-258-3420</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif">Cell
508-930-3461</span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif"><a
href="http://www.draper.com" target="_blank"
moz-do-not-send="true"><span
style="color:rgb(5,99,193)">www.draper.com</span></a></span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><span
style="font-size:11pt;font-family:"Calibri",sans-serif;color:rgb(31,73,125)"> </span></p>
<p class="MsoNormal"><b><span
style="font-size:11pt;font-family:"Calibri",sans-serif">From:</span></b><span
style="font-size:11pt;font-family:"Calibri",sans-serif"> <a
href="mailto:labnetwork-bounces@mtl.mit.edu"
target="_blank" moz-do-not-send="true">labnetwork-bounces@mtl.mit.edu</a>
[mailto:<a
href="mailto:labnetwork-bounces@mtl.mit.edu"
target="_blank" moz-do-not-send="true">labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Cenk Yanik (Alumni)<br>
<b>Sent:</b> Wednesday, October 09, 2019 2:59 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu"
target="_blank" moz-do-not-send="true">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] RIE Process Gases</span></p>
<p class="MsoNormal"> </p>
<div>
<div>
<p class="MsoNormal">Dear All,</p>
</div>
<div>
<p class="MsoNormal">We are wondering how often do
you change the RIE process gases even the gases
are not run out. We have been told that they
should be changed in max 3 years even if they are
almost full but we have been using some of them
(SF6, C4F8, CHF3) for 5 years and we didn't
realize any process-related critical problems
during the dry etching process.</p>
</div>
<div>
<p class="MsoNormal">Have you ever faced with any
problems for Fluorine and Chlorine based gases in
your institutes?</p>
</div>
<div>
<p class="MsoNormal">We would appreciate if you
could share your experiences and regulations
considering the shell life of the process gases at
your facilities</p>
</div>
<div>
<p class="MsoNormal">Best Regards,</p>
</div>
<div>
<p class="MsoNormal"> </p>
</div>
<div>
<p class="MsoNormal">-- </p>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><br>
<span
style="font-family:"Tahoma",sans-serif">Cenk
YANIK, PhD</span></p>
</div>
<p class="MsoNormal"
style="margin-bottom:12pt"><span
style="font-family:"Tahoma",sans-serif">Nanofabrication
Team Leader</span></p>
<div>
<p class="MsoNormal"><span
style="font-family:"Tahoma",sans-serif">Sabanci
University <br>
Nanotechnology Research and
Application Center ( SUNUM )<br>
Orta Mahalle, Üniversite Caddesi
No: 27 34956 Tuzla - İstanbul<br>
Office:+90 216 483 9994<br>
web:</span> <a
href="http://sunum.sabanciuniv.edu"
target="_blank"
moz-do-not-send="true">sunum.sabanciuniv.edu</a></p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
<hr> Notice: This email and any attachments may contain
proprietary (Draper non-public) and/or export-controlled
information of Draper. If you are not the intended
recipient of this email, please immediately notify the
sender by replying to this email and immediately destroy
all copies of this email.
<hr>
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</blockquote>
</div>
<br clear="all">
<br>
-- <br>
<div dir="ltr" class="gmail_signature">
<div dir="ltr">
<div>
<div dir="ltr">
<div>
<div dir="ltr">
<div>
<div dir="ltr">
<div><br>
<span style="font-family:tahoma,sans-serif">Cenk
YANIK, PhD<i><br>
</i></span></div>
<span style="font-family:tahoma,sans-serif">Nanofabrication
Team Leader</span><br>
<span></span><br>
<div><span style="font-family:tahoma,sans-serif">Sabanci
University <br>
Nanotechnology Research and Application
Center ( SUNUM )<br>
Orta Mahalle, Üniversite Caddesi No: 27
34956 Tuzla - İstanbul<br>
Office:</span><span><span
style="font-family:tahoma,sans-serif">+90
216 483 9994<br>
web:</span> </span><a
href="http://sunum.sabanciuniv.edu"
target="_blank" moz-do-not-send="true">sunum.sabanciuniv.edu</a><span></span><br>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
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</div>
</div>
<br>
<fieldset class="mimeAttachmentHeader"></fieldset>
<pre class="moz-quote-pre" wrap="">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
</pre>
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