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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hello Cenk,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">We change our SF6 and C4F8 every year because the bottles have been emptied. However, we have had the same CHF3 bottle for over seven years without
any known problem.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Best regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Leif<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><img width="36" height="53" id="_x0000_i1025" src="cid:image001.png@01D57EBC.59846D20" alt="http://www.dtu.dk/-/media/DTU_Generelt/Andet/mail-signature-logo.png"></span><span style="color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:120%"><b><span style="font-family:"Arial","sans-serif";color:black">Leif Steen Johansen<o:p></o:p></span></b></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span lang="EN-US" style="font-size:8.5pt;font-family:"Arial","sans-serif";color:black">Head of Operations, Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial","sans-serif";color:black">Dir. +45 45 25 57 13<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial","sans-serif";color:black">Mob. +45 25 34 89 92<o:p></o:p></span></p>
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<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial","sans-serif";color:black">Ørsteds Plads, Byg. 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial","sans-serif";color:black">Building 347<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial","sans-serif";color:black">2800 Lyngby<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.75pt"><span style="font-size:8.5pt;font-family:"Arial","sans-serif";color:black"><a href="https://www.dtu.dk/english"><span style="color:black;text-decoration:none">www.dtu.dk/english</span></a>
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Cenk Yanik (Alumni)<br>
<b>Sent:</b> 9. oktober 2019 08:59<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] RIE Process Gases<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Dear All,<o:p></o:p></p>
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<p class="MsoNormal">We are wondering how often do you change the RIE process gases even the gases are not run out. We have been told that they should be changed in max 3 years even if they are almost full but we have been using some of them (SF6, C4F8, CHF3)
for 5 years and we didn't realize any process-related critical problems during the dry etching process.<o:p></o:p></p>
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<p class="MsoNormal">Have you ever faced with any problems for Fluorine and Chlorine based gases in your institutes?<o:p></o:p></p>
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<p class="MsoNormal">We would appreciate if you could share your experiences and regulations considering the shell life of the process gases at your facilities<o:p></o:p></p>
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<p class="MsoNormal">Best Regards,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">-- <o:p></o:p></p>
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<p class="MsoNormal"><br>
<span style="font-family:"Tahoma","sans-serif"">Cenk YANIK, PhD</span><o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-family:"Tahoma","sans-serif"">Nanofabrication Team Leader</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Tahoma","sans-serif"">Sabanci University
<br>
Nanotechnology Research and Application Center ( SUNUM )<br>
Orta Mahalle, Üniversite Caddesi No: 27 34956 Tuzla - İstanbul<br>
Office:+90 216 483 9994<br>
web:</span> <a href="http://sunum.sabanciuniv.edu">sunum.sabanciuniv.edu</a><o:p></o:p></p>
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