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<p class="MsoNormal"><span style="color:#1F497D">Hi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">How is the wafer masked for the etch?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">How deep is the etch?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Have you already developed the ICP/RIE process if so what tool was it on?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Remember that an ICP/RIE is only going to be operational 90% of the time due to cleans and PM schedules. Then the vendor would have other customers to work in so with your wafer volumes this will be a challenge.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">10K wafers per year is ~ 193 wafers per week assuming no photolitho operation a 5 minute etch with overhead is really 7-8 minutes so it would take 1544 minutes to just etch, that is 25 hours work per week. Then
you need to add in inspections and clean operations.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">200K wafers per year is ~3846 per week you will need 30768 minutes of etch time a week or 512 fab hours, a 24/7 fab is 168 hours per week so you would need 5 tools.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Good luck with your search, Draper has a small capability nowhere what you need, try IMT in Santa Barbara Ca.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Fabien Dauzou<br>
<b>Sent:</b> Wednesday, October 16, 2019 2:18 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Subcontracting dry etching scenarios<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="FR">Dear Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">I am wondering if you can help us, or maybe give us some direction.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">As a startup with potential customers we are looking for subcontracting part of our process.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">I cannot find it but It would be nice and useful to have a list of all facilities and their possible prototyping/preproduction capacities. Let me know if you have one!<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Below are our possible scenarios:<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Scenario 1 :<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">10K wafers<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">4’’ fused-silica wafer 0.55 mm<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">ICP-RIE ~ 5 min etch time<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Total price or /wafer? timing?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Scenario 2 :<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">200K wafer/year<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">4’’ fused-silica wafer 0.55 mm<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">ICP-RIE ~ 5 min etch time<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Feasibility % ? Total price or $/wafer? </span>
<span lang="FR">Timing?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">If any facilities is capable of these challenges, please contact me.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-CA">Best regards, Bien cordialement,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="mso-fareast-language:EN-CA">Fabien Dauzou (Jr. Eng.)<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="mso-fareast-language:EN-CA">R&D Process Engineer/Entrepreneur<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-CA"><a href="mailto:fabien@edgehogtech.com"><span lang="FR">fabien@edgehogtech.com</span></a></span><span lang="FR" style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="mso-fareast-language:EN-CA">Mob: 438-868-1657<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-CA"><a href="https://www.edgehogtech.com/"><span lang="FR">https://www.edgehogtech.com/</span></a></span><span lang="FR" style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-CA"><img border="0" width="322" height="235" id="Picture_x0020_39" src="cid:image001.png@01D584AE.8DE070D0"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:10.0pt;mso-fareast-language:EN-CA">780 Av. Brewster, RC-016, Montreal, QC, Canada, H4C 2K1<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:8.0pt;color:#00B050;mso-fareast-language:EN-CA">Think green, before printing this email.</span><span style="font-size:8.0pt;color:#00B050;mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
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