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Hi Shane,<br>
<br>
Our PECVD pump's exhaust goes through a scrubber on its way to a
teflon-coated stainless steel exhaust system.<br>
<br>
We have a "solvent" exhaust system (stainless steel) and a
"corrosive" exhaust system (teflon-coated stainless steel). <br>
<br>
It's easy to connect fume hoods to the "proper" exhaust system. It's
not so easy for tools (because they use combinations of types of
gases) so we tend to connect the etchers and the CVD tools to the
corrosive system. The teflon-coated system offers both corrosion
protection (through the teflon coating) and fire protection (through
the stainless steel). As I mentioned at the beginning, we use point
of use abatement on those tools as an added measure. <br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 11/6/2019 9:01 AM, Xin (Shane) Guo
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:CAKLE_GZfqtTLb9rUFw3gzHUr7bgQB6ZCKMBOr+FeDCEDFkuWqw@mail.gmail.com">
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<div class="gmail_default"
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Hi Colleagues,<br>
</div>
<div class="gmail_default"
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<br>
</div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;font-size:small">
We are trying to set up a dual chamber PECVD-RIE system. Our
internal team has concerns of mixed fumes sharing the same
exhaust. The gases involve NH3(in a gas cabinet), N2, O2, Ar,
He, SF6, CHF3, CF4, TEOS and DES (vapor draw), though it
should be only traces of the waste gases going into the
exhaust. <br>
</div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;font-size:small">
<br>
</div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;font-size:small">
Can you share what your practice is in your facility? Do you
use separate exhaust for different groups of gases? What is
the best place to find the guideline or regulation of such
thing? </div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;font-size:small">
<br>
</div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;font-size:small">
Best</div>
<div class="gmail_default"
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<br>
</div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;font-size:small">
Shane</div>
</div>
<br>
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</pre>
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