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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Shane,<br>
Our lab setup is very similar to that described by Iulian except we don’t have POU scrubbers. We do however have toxic gas monitors in all exhaust streams and in 15 years they have never measured a detectable amount to trigger an alarm. My guess is that would
be the first sign that we had any kind of risk.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Mark Heiden<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">NanoFab Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Center for Nanoscale Science and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of California, Riverside<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">951-827-2551<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="https://nanofab.ucr.edu/"><span style="color:#0563C1">https://nanofab.ucr.edu/</span></a>
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:windowtext">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:windowtext"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Iulian Codreanu<br>
<b>Sent:</b> Wednesday, November 06, 2019 9:41 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Gas exhaust<o:p></o:p></span></p>
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<p class="MsoNormal">Hi Shane,<br>
<br>
Our PECVD pump's exhaust goes through a scrubber on its way to a teflon-coated stainless steel exhaust system.<br>
<br>
We have a "solvent" exhaust system (stainless steel) and a "corrosive" exhaust system (teflon-coated stainless steel).
<br>
<br>
It's easy to connect fume hoods to the "proper" exhaust system. It's not so easy for tools (because they use combinations of types of gases) so we tend to connect the etchers and the CVD tools to the corrosive system. The teflon-coated system offers both corrosion
protection (through the teflon coating) and fire protection (through the stainless steel). As I mentioned at the beginning, we use point of use abatement on those tools as an added measure.
<br>
<br>
Iulian<br>
<br>
<o:p></o:p></p>
<pre>iulian Codreanu, Ph.D.<o:p></o:p></pre>
<pre>Director, Nanofabrication Facility<o:p></o:p></pre>
<pre>University of Delaware<o:p></o:p></pre>
<pre>Harker ISE Lab, Room 163<o:p></o:p></pre>
<pre>221 Academy Street<o:p></o:p></pre>
<pre>Newark, DE 19716<o:p></o:p></pre>
<pre>302-831-2784<o:p></o:p></pre>
<pre><a href="http://udnf.udel.edu">http://udnf.udel.edu</a><o:p></o:p></pre>
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<p class="MsoNormal">On 11/6/2019 9:01 AM, Xin (Shane) Guo wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif">Hi Colleagues,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif">We are trying to set up a dual chamber PECVD-RIE system. Our internal team has concerns of mixed fumes sharing the same exhaust. The gases involve NH3(in a gas cabinet), N2, O2, Ar, He, SF6,
CHF3, CF4, TEOS and DES (vapor draw), though it should be only traces of the waste gases going into the exhaust. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif">Can you share what your practice is in your facility? Do you use separate exhaust for different groups of gases? What is the best place to find the guideline or regulation of such thing? <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif">Best<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif">Shane<o:p></o:p></span></p>
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<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
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<p class="MsoNormal"><o:p> </o:p></p>
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