<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
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<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Cambria;
panose-1:2 4 5 3 5 4 6 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle18
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle19
{mso-style-type:personal-reply;
color:black;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal"><span style="color:black">HI Lei<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Here at Draper we have a traditional “sidewinder” style clean room. A large majority of our tools are bulkhead mounted, with very slight air gaps between the tool and wall. Of course the rooms were balanced with
this in mind. We have not had any particle issues and can maintain class 100 and 1000 in those areas. All of our pumps ,chillers , critical alignment tools are on vibration isolation pads that really helped out tremendously. I found them at isolateit.com
there are different types.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;color:black">Mark R. April<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="color:black"><img width="229" height="14" style="width:2.3854in;height:.1458in" id="Picture_x0020_1" src="cid:image001.jpg@01D5984E.91664F50" alt="https://intranet.draper.com/pcweb/media/branding/images/logo_styles/color_logo.jpg"></span><span style="font-size:8.0pt;font-family:"Cambria",serif;color:black"><br>
</span><span style="font-size:9.0pt;color:black">Senior Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;color:black">Microfabrication Laboratory Lead<br>
<i>555 Technology Square<o:p></o:p></i></span></p>
<p class="MsoNormal"><i><span style="font-size:9.0pt;color:black">Cambridge, MA 02139<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="font-size:9.0pt;color:black"><a href="mailto:mapril@draper.com"><span style="color:#0563C1">mapril@draper.com</span></a>
<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="font-size:9.0pt;color:black">O # 617-258-1613 C # 617-455-1596<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="font-size:9.0pt;color:black"><a href="http://www.draper.com/"><span style="color:#0563C1">www.draper.com</span></a></span></i><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Paolini, Steven<br>
<b>Sent:</b> Friday, November 8, 2019 5:57 PM<br>
<b>To:</b> Wang, Lei <lei.z.wang@yale.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Bulkhead between cleanroom and regular service room<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Lei,<o:p></o:p></p>
<p class="MsoNormal"> I need to know a few things before answering; Is your clean room a ballroom style with raised floors or is it a traditional “sidewinder” style where the return air passes into the chases and back up to the pre-filters?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:14.0pt">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt"><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt"><a href="http://www.cns.fas.harvard.edu">www.cns.fas.harvard.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Wang, Lei<br>
<b>Sent:</b> Friday, November 08, 2019 2:20 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Bulkhead between cleanroom and regular service room<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">Dear Colleagues,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">We are working on cleanroom expansion, but might with a regular service room. Does anyone have experience with bulkhead method between cleanroom and 'dirty' service room? <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">The front of our new e beam evaporator will sit in cleanroom, but the back might be in a regular service room. Anyone knows is there any issue for this wall mount method? Do we need to seal all
the gaps to avoid the contamination coming from the service room? Is the vibration a big problem when the system is running?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">All suggestions and comments are welcome.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">Thank you so much.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">Lei<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">Lei Wang, Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">Yale West Campus Cleanroom<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">750 West Campus Drive<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">West Haven, CT, 06516<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black;background:white"><a href="mailto:lei.z.wang@yale.edu">lei.z.wang@yale.edu</a></span><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">203-737-6579<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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