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Hi Kevin,<br>
<br>
I second Dennis' recommendation. I have the MFC bypass arrangement
for flammable, pyrophoric, toxic, and corrosive gases.<br>
<br>
Best,<br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 1/23/2020 2:47 PM, Dennis Schweiger
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:CAKzi2_MaU4ngimvRrvVZw-SqVKrCTZwXTOtiiN4w9H-_-CsM_Q@mail.gmail.com">
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<div class="gmail_default" style="font-family:arial,sans-serif">Kevin,</div>
<div class="gmail_default" style="font-family:arial,sans-serif"><br>
</div>
<div class="gmail_default" style="font-family:arial,sans-serif">good
afternoon. You have an interesting assortment of technologies
in your gas box, micro-fit, and the older TB7 weld hardware.
Since your two "new" gases are relatively inert, I would pick
the simplest install to make them active. Typically the
bypass arrangement you see on a couple of the channels is for
when you need to remove the MFC, and it's plugged. If you
were using a reactive gas, the bypass gives you a way to
evacuate both ends of the MFC, making it "safe" to remove.</div>
<div class="gmail_default" style="font-family:arial,sans-serif"><br>
</div>
<div>
<div dir="ltr" class="gmail_signature"
data-smartmail="gmail_signature">
<div>Dennis<span class="gmail_default"
style="font-family:arial,sans-serif"> Schweiger</span></div>
<div><span class="gmail_default"
style="font-family:arial,sans-serif">University of
Michigan/LNF</span></div>
<div><span class="gmail_default"
style="font-family:arial,sans-serif">Facilities</span></div>
<div> </div>
<div>734.647.2055 Ofc<br>
</div>
</div>
</div>
<br>
</div>
<br>
<div class="gmail_quote">
<div dir="ltr" class="gmail_attr">On Thu, Jan 23, 2020 at 11:52
AM Kevin M McPeak <<a href="mailto:kmcpeak@lsu.edu"
moz-do-not-send="true">kmcpeak@lsu.edu</a>> wrote:<br>
</div>
<blockquote class="gmail_quote" style="margin:0px 0px 0px
0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">Dear
Colleagues,<br>
<br>
Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford
ICP100 system. The gas pod (see attached photo) currently has
the following gases plumbed from top to bottom: O2, N2, CF4,
and SF6. Notice, the current CF4 and SF6 lines have additional
valves and plumbing. <br>
<br>
When I add the C4F8 and CHF3 do you recommend I plumb them
like the O2 and N2 gases (filter -> MFC -> valve) are or
do I need to add the additional valves and plumbing like the
SF6 and CF8 lines are? We can do either but the SF6/CF4 method
is a lot more money and time. This is an old gas pod, circa
1995 and Oxford has limited information. and advice. <br>
<br>
NOTE: The two output lines (top line and 3rd from top) from
the gas pod get merged at the tool before entering the
instrument. I am not sure why it was plumbed this way back in
1995.<br>
<br>
Regards,<br>
Kevin<br>
<br>
--<br>
Kevin M. McPeak<br>
Assistant Professor | LSU Dept. of Chemical Engineering<br>
225-578-0058 | <a href="http://mcpeaklab.com"
rel="noreferrer" target="_blank" moz-do-not-send="true">mcpeaklab.com</a>
| <a href="http://lsu.edu/nanofabrication" rel="noreferrer"
target="_blank" moz-do-not-send="true">lsu.edu/nanofabrication</a><br>
<br>
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