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<span>Hello,</span></div>
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<div style="background-color: rgb(255, 255, 255); color: rgb(0, 0, 0);"><font face="Calibri, Arial, Helvetica, sans-serif"><span style="font-size: 12pt;">We have a first generation Cambridge ALD system. They have changed the system and the custom fast acting
solenoid valves used to pulse the precursor are no longer made. They are sealed unit so there is no chance at a repair. Has anyone found a drop in replacement? Any replacement? Design for new heather block with different valve? Its a good system but the
</span>valves<span style="font-size: 12pt;"> have gummed up over the last 12 years.</span></font></div>
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<span>Here is the part # for the Parker Valve that is no longer made:<br>
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<div>099$B!>(B0381$B!>(B900 Parker Solenoid Valve for Savannah S100 $B!>(B 3$B!>(Bway N.C. (2$B!>(Bway) valve, 1/4" Vacuseal female fittings, 0.116" orifice, Kalrez, 0.5 amp @ 24 V</div>
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<div>Thanks!</div>
<div>Brian</div>
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<div class="PlainText" style=""><font color="#000000" face="Tahoma" data-ogsc="" style="">*********************************************</font><br>
<font color="#000000" face="Tahoma" data-ogsc="" style="">Brian Wajdyk</font><br>
<font size="2" style=""><font color="#000000" face="Tahoma" data-ogsc="" style="">Facility Manager / Research </font></font></div>
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<font size="2" style=""><font size="2"><span>Center for Nanoscale Science and Engineering. </span></font><br>
University of Kentucky<br>
Office: ASTeCC 372<br>
<font size="2"><font size="2">Email: Brian<font size="2">.Wajdyk<font size="2">@uky.edu</font></font></font></font></font><br>
Ph: 859-218-6548<br>
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