<div dir="ltr">Hello Brian,<div><br></div><div>You may have seen one of the most recent notes regarding a Savannah - I'm one of the original Cambridge NanoTech folks. The original ALD team is now a part of Veeco.</div><div><br></div><div>The electromechanical valves from this system were discontinued by Parker in 2008 and we stopped selling them in 2006. Unfortunately, we haven't found a electromechanical replacement which exhibits any of the reliability or heat tolerance of the industry standard Swagelok ALD valves. The long story short is that we don't have a drop in replacement for the Parker valves.</div><div><br></div><div>That being said, we do have some upgrade options for you to get you into a modern setup but they'd involve replacing the entire ALD valve manifold.</div><div><br></div><div>Please reach out to me at <a href="mailto:edeguns@veeco.com">edeguns@veeco.com</a> and/or <a href="mailto:ALDsupport@veeco.com">ALDsupport@veeco.com</a> and we can discuss some options for you.</div><div><br></div><div>Thanks in advance,</div><div><br></div><div>Eric</div><div><br></div><div><div><br></div></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Feb 6, 2020 at 7:04 PM Wajdyk, Brian L. <<a href="mailto:brian.wajdyk@uky.edu">brian.wajdyk@uky.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<span>Hello,</span></div>
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<div style="background-color:rgb(255,255,255);color:rgb(0,0,0)"><font face="Calibri, Arial, Helvetica, sans-serif"><span style="font-size:12pt">We have a first generation Cambridge ALD system. They have changed the system and the custom fast acting
solenoid valves used to pulse the precursor are no longer made. They are sealed unit so there is no chance at a repair. Has anyone found a drop in replacement? Any replacement? Design for new heather block with different valve? Its a good system but the
</span>valves<span style="font-size:12pt"> have gummed up over the last 12 years.</span></font></div>
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<span>Here is the part # for the Parker Valve that is no longer made:<br>
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<div>099‐0381‐900 Parker Solenoid Valve for Savannah S100 ‐ 3‐way N.C. (2‐way) valve, 1/4" Vacuseal female fittings, 0.116" orifice, Kalrez, 0.5 amp @ 24 V</div>
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<div>Thanks!</div>
<div>Brian</div>
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<div><font color="#000000" face="Tahoma">*********************************************</font><br>
<font color="#000000" face="Tahoma">Brian Wajdyk</font><br>
<font size="2"><font color="#000000" face="Tahoma">Facility Manager / Research </font></font></div>
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<font size="2"><font size="2"><span>Center for Nanoscale Science and Engineering. </span></font><br>
University of Kentucky<br>
Office: ASTeCC 372<br>
<font size="2"><font size="2">Email: Brian<font size="2">.Wajdyk<font size="2">@<a href="http://uky.edu" target="_blank">uky.edu</a></font></font></font></font></font><br>
Ph: 859-218-6548<br>
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