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<p class="MsoNormal"><span style="color:#1F497D">We haven’t etched that material, but any plasma processing with BCL3 we raise the processing temp of the cooling water. BCL3 loves to condense at room temps, so we take our chiller up to 35 degrees C to make
sure it stays in vapor form. And wrap the gas lines with heat tape.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Julia Aebersold, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(502) 852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://louisville.edu/micronano/"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Shepard, Jeremiah J<br>
<b>Sent:</b> Wednesday, February 12, 2020 3:42 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Cc:</b> Raghunathan, Nithin <nithin@purdue.edu>; Dilley, Neil R <ndilley@purdue.edu><br>
<b>Subject:</b> [labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have experience etching Zinc Sulfide and Zinc Selenide?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">It appears chemistry would involve BCL3.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">My primary concern is chamber contamination, any experience or thoughts? Thank you in advance!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal">Jerry Shepard<o:p></o:p></p>
<p class="MsoNormal">Research Engineer<o:p></o:p></p>
<p class="MsoNormal">Purdue University<o:p></o:p></p>
<p class="MsoNormal">Birck Nanotechnology Center<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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