<div dir="ltr"><div dir="ltr"><div dir="ltr"><div class="gmail_default" style="font-family:"times new roman",serif;font-size:large">We have a relatively successful recipe which works with both ZnS & ZnSe:</div><div class="gmail_default" style="font-family:"times new roman",serif;font-size:large"><a href="https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_Etching_Recipes#ZnS_Etching_.28RIE_2.29">https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_Etching_Recipes#ZnS_Etching_.28RIE_2.29</a><br></div><div class="gmail_default" style="font-family:"times new roman",serif;font-size:large">– Methane/Hydrogen RIE etch.</div><div class="gmail_default" style="font-family:"times new roman",serif;font-size:large"><br></div><div class="gmail_default" style="font-family:"times new roman",serif;font-size:large">This is on one of our older Capacitive RIE systems: <a href="https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_2_(MRC)">https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_2_(MRC)</a></div><div class="gmail_default" style="font-family:"times new roman",serif;font-size:large">We do have some very sensitive etches on this tool, and long ZnS etches did not appear to cause any visible problems to those.</div><div><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div style="font-family:"times new roman",serif"><font size="4">-- Demis</font></div><div style="font-family:"times new roman",serif"><font size="4"><br></font></div><div style="font-family:"times new roman",serif"><font size="4">----------------------------------------</font></div><div style="font-family:"times new roman",serif"><font size="4"> <a href="mailto:demis@ucsb.edu" target="_blank"><font color="#1155cc">demis@ucsb.edu</font></a></font></div><div style="font-family:"times new roman",serif"><div style="font-family:"times new roman",serif"><i><font size="4"> Process Scientist Manager</font></i></div></div><div style="font-family:"times new roman",serif"><font size="4"> <a href="https://www.nanotech.ucsb.edu/" target="_blank"><font color="#1155cc">UCSB Nanofabrication Facility</font></a></font></div><div style="font-family:"times new roman",serif"><div style="font-family:"times new roman",serif"><font size="4">----------------------------------------</font></div></div><div style="font-family:"times new roman",serif;font-size:small"><br></div></div></div></div></div></div></div></div></div></div><br></div></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Feb 13, 2020 at 5:43 PM Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;border-left-color:rgb(204,204,204);padding-left:1ex">
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<p class="MsoNormal"><span style="color:rgb(31,73,125)">We haven’t etched that material, but any plasma processing with BCL3 we raise the processing temp of the cooling water. BCL3 loves to condense at room temps, so we take our chiller up to 35 degrees C to make
sure it stays in vapor form. And wrap the gas lines with heat tape.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
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<p class="MsoNormal"><span style="color:rgb(31,73,125)">Cheers!<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">Julia Aebersold, Ph.D.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">Manager, Micro/Nano Technology Center<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">University of Louisville<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">Shumaker Research Building, Room 233<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">2210 South Brook Street<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">Louisville, KY 40292<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">(502) 852-1572<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><a href="http://louisville.edu/micronano/" target="_blank"><span style="color:rgb(5,99,193)">http://louisville.edu/micronano/</span></a><u></u><u></u></span></p>
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<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
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<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Shepard, Jeremiah J<br>
<b>Sent:</b> Wednesday, February 12, 2020 3:42 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Cc:</b> Raghunathan, Nithin <<a href="mailto:nithin@purdue.edu" target="_blank">nithin@purdue.edu</a>>; Dilley, Neil R <<a href="mailto:ndilley@purdue.edu" target="_blank">ndilley@purdue.edu</a>><br>
<b>Subject:</b> [labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Does anyone have experience etching Zinc Sulfide and Zinc Selenide?<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">It appears chemistry would involve BCL3.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">My primary concern is chamber contamination, any experience or thoughts? Thank you in advance!<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Thank you,<u></u><u></u></p>
<p class="MsoNormal">Jerry Shepard<u></u><u></u></p>
<p class="MsoNormal">Research Engineer<u></u><u></u></p>
<p class="MsoNormal">Purdue University<u></u><u></u></p>
<p class="MsoNormal">Birck Nanotechnology Center<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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