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<p class="MsoNormal">Sean,<o:p></o:p></p>
<p class="MsoNormal"> If the BCl3 is being delivered to a vacuum system such as an etcher, I would highly recommend delivering the gas at sub-atmospheric pressures. As we all know, the lower the pressure, the lower the boiling point. I have struggled with
heating gas lines and increasing the room temperature gradient for some years until I started delivering at sub-atmospheric (~5” Hg). I have never had a problem since.<o:p></o:p></p>
<p class="MsoNormal">Good luck,<o:p></o:p></p>
<p class="MsoNormal"> Equipment Dood<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:14.0pt">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Rinehart, Sean<br>
<b>Sent:</b> Tuesday, February 18, 2020 9:42 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] BCl3 Condensation<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I know that BCl3 condensation and line heating have been brought up several times in the past so this seemed like a good place to ask about the consequences of BCl3 condensation. Barring subsequent exposure to moisture is there any permanent
damage to the delivery system, or does it just affect process gas mixture and block gas flow until it evaporates off?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Also, if the delivery pressure is regulated to below the vapor pressure at the coldest point in the delivery system would that effectively eliminate the risk of condensation?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Sean Rinehart<o:p></o:p></p>
<p class="MsoNormal">Assistant Director, Cleanroom Operations<o:p></o:p></p>
<p class="MsoNormal">Yale University<o:p></o:p></p>
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