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panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
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a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
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color:purple;
text-decoration:underline;}
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{mso-style-name:msonormal;
mso-margin-top-alt:auto;
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color:windowtext;}
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margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
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--></style><!--[if gte mso 9]><xml>
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<p class="MsoNormal">Thank you all for your input, it helps and I greatly appreciate it!
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<p class="MsoNormal">Jerry<o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> Kevin Owen <kjvowen@lnf.umich.edu> <br>
<b>Sent:</b> Friday, February 14, 2020 9:00 AM<br>
<b>To:</b> demis@ucsb.edu<br>
<b>Cc:</b> Shepard, Jeremiah J <jshepar@purdue.edu>; labnetwork@mtl.mit.edu; Raghunathan, Nithin <nithin@purdue.edu>; Dilley, Neil R <ndilley@purdue.edu><br>
<b>Subject:</b> Re: [labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples<o:p></o:p></p>
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<p class="MsoNormal">I would expect that a CCP may be less susceptible to process shift in this case, at least in my experience redeposition onto a cathode is not nearly as detrimental as onto a coil ceramic (as in the case of ICP). And as was already mentioned,
it's unlikely to be completely volatile.<o:p></o:p></p>
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<p class="MsoNormal">I'll also add that at the LNF, we decided a few years ago that we would not allow any selenides into any system that has a fluorine gas plumbed. Selenium fluorides are highly toxic (SeF6 has an IDLH of 2 ppm), and we were concerned that
even if the gas isn't used in that specific etch, in theory there could be reactions with any fluorinated chamber wall deposition from a previous process. This may be overkill (and I'm curious what others think), but that was the decision we made.<o:p></o:p></p>
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<p class="MsoNormal">We'll be moving pretty much all of our chalcogenide processes to our ion mill (as well as all other materials with predominantly nonvolatile etch byproducts).<o:p></o:p></p>
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<p class="MsoNormal">-Kevin<o:p></o:p></p>
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<p class="MsoNormal">On Fri, Feb 14, 2020 at 8:00 AM Demis D. John <<a href="mailto:demis@ece.ucsb.edu">demis@ece.ucsb.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:18.0pt;font-family:"Times New Roman",serif">We have a relatively successful recipe which works with both ZnS & ZnSe:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:18.0pt;font-family:"Times New Roman",serif"><a href="https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_Etching_Recipes#ZnS_Etching_.28RIE_2.29" target="_blank">https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_Etching_Recipes#ZnS_Etching_.28RIE_2.29</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:18.0pt;font-family:"Times New Roman",serif">– Methane/Hydrogen RIE etch.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:18.0pt;font-family:"Times New Roman",serif">This is on one of our older Capacitive RIE systems: <a href="https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_2_(MRC)" target="_blank">https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_2_(MRC)</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:18.0pt;font-family:"Times New Roman",serif">We do have some very sensitive etches on this tool, and long ZnS etches did not appear to cause any visible problems to those.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Times New Roman",serif">-- Demis</span><span style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Times New Roman",serif">----------------------------------------</span><span style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Times New Roman",serif"> <a href="mailto:demis@ucsb.edu" target="_blank"><span style="color:#1155CC">demis@ucsb.edu</span></a></span><span style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="font-size:13.5pt;font-family:"Times New Roman",serif"> Process Scientist Manager</span></i><span style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Times New Roman",serif"> <a href="https://www.nanotech.ucsb.edu/" target="_blank"><span style="color:#1155CC">UCSB Nanofabrication Facility</span></a></span><span style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Times New Roman",serif">----------------------------------------</span><span style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">On Thu, Feb 13, 2020 at 5:43 PM Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu" target="_blank">julia.aebersold@louisville.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">We haven’t etched that material, but any plasma processing with BCL3 we raise the processing temp of the cooling water. BCL3 loves to condense at room
temps, so we take our chiller up to 35 degrees C to make sure it stays in vapor form. And wrap the gas lines with heat tape.</span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">Cheers!</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">Julia Aebersold, Ph.D.</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">Manager, Micro/Nano Technology Center</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">University of Louisville</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">Shumaker Research Building, Room 233</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">2210 South Brook Street</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">Louisville, KY 40292</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D">(502) 852-1572</span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D"><a href="http://louisville.edu/micronano/" target="_blank"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a></span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b>From:</b>
<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Shepard, Jeremiah J<br>
<b>Sent:</b> Wednesday, February 12, 2020 3:42 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Cc:</b> Raghunathan, Nithin <<a href="mailto:nithin@purdue.edu" target="_blank">nithin@purdue.edu</a>>; Dilley, Neil R <<a href="mailto:ndilley@purdue.edu" target="_blank">ndilley@purdue.edu</a>><br>
<b>Subject:</b> [labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Does anyone have experience etching Zinc Sulfide and Zinc Selenide?<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">It appears chemistry would involve BCL3.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">My primary concern is chamber contamination, any experience or thoughts? Thank you in advance!<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Thank you,<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Jerry Shepard<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Research Engineer<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Purdue University<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Birck Nanotechnology Center<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
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<p class="MsoNormal">_______________________________________________<br>
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<p class="MsoNormal">_______________________________________________<br>
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<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></p>
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<p class="MsoNormal">-- <o:p></o:p></p>
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<p class="MsoNormal">Kevin Owen<o:p></o:p></p>
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<p class="MsoNormal">Senior Engineer in Research<o:p></o:p></p>
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<p class="MsoNormal">Operations Group, Lurie Nanofabrication Facility<o:p></o:p></p>
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<p class="MsoNormal">University of Michigan<o:p></o:p></p>
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<p class="MsoNormal">(734) 545-4014<o:p></o:p></p>
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