<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">Hi Edmond,<div class=""><br class=""></div><div class="">We have a ~5 year old Dektak-XT that was bought to support our two other older profilometers. We’ve been pleased with the accuracy and general performance, but the software can be a bit glitchy at times. We’ve also found KLA/Tencor’s software’s automation functions (for scanning repetitive features across a large area) to be easier and more reliable than than Bruker’s. I still personally prefer the Dektak, but it has its drawbacks as with any tool.</div><div class=""><br class=""><div class="">
<div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class=""><div>N. Shane Patrick<br class="">Manager, Lab Operations and Safety<br class="">Electron Beam Lithography<br class="">Washington Nanofabrication Facility (WNF) <br class="">National Nanotechnology Coordinated Infrastructure (NNCI)<br class="">University of Washington - NanoES<br class="">Fluke Hall 129, Box 352143<br class="">(206) 221-1045<br class=""><a href="mailto:patricns@uw.edu" class="">patricns@uw.edu</a><br class=""><a href="http://www.wnf.washington.edu/" class="">http://www.wnf.washington.edu/</a></div></div>
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<div><br class=""><blockquote type="cite" class=""><div class="">On Feb 24, 2020, at 2:42 PM, Edmond Chow <<a href="mailto:kchow10@gmail.com" class="">kchow10@gmail.com</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div dir="ltr" class=""><div class="">Hi,</div><div class=""><br class=""></div>We are trying to decide whether to purchase KLA P7 profiler or Bruker Dektak DXT-A profiler.<div class=""><br class=""></div><div class="">We will appreciate your feedback if you have those systems in your lab.</div><div class=""><br class=""></div><div class="">Bruker system seems to slightly cheaper, but they limit to 55mm scan range, I wonder how good is their stitching process if we need to scan 100mm wafer.</div><div class=""><br class=""></div><div class="">Thanks.<br class=""><div class=""><div class=""><br class=""></div>-- <br class=""><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature">Edmond Chow</div></div></div></div>
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