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<p>Dear all,<br>
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I have a question about MBE systems that are used for metal-oxide growth. </p>
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In our MBE system we use oxygen flow rate of 0.3 - 0.4 sccm, which leaves the chamber pressure at about 1E-5 Torr.</p>
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The chamber incorporated LN2 cooling shrouds. My question is that do you think that there is any concern regrading liquefaction of oxygen on the chamber's wall, that might end up dripping down the walls, evaporating and causing a pressure burst.</p>
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I have not encountered the problem yet, but I was wondering if over time, and for long growth time this might become an issue. Has anyone encountered this issue before? </p>
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Any input is much appreciated,</p>
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Best,</p>
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<font face="Calibri,Helvetica,sans-serif,serif,EmojiFont" size="2"><span style="font-size: 16px;"><font face="Calibri,Helvetica,sans-serif,Helvetica,EmojiFont,Apple Color Emoji,Segoe UI Emoji,NotoColorEmoji,Segoe UI Symbol,Android Emoji,EmojiSymbols" size="2"><span style="font-size: 16px;"><i>Saba
Sadeghi, PhD</i></span></font></span></font></div>
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<font face="Calibri,Helvetica,sans-serif,serif,EmojiFont" size="2"><span style="font-size: 16px;"><font face="Calibri,Helvetica,sans-serif,Helvetica,EmojiFont,Apple Color Emoji,Segoe UI Emoji,NotoColorEmoji,Segoe UI Symbol,Android Emoji,EmojiSymbols" size="2"><span style="font-size: 16px;"><i>Quantum
Devices Fabrication Scientist</i></span></font></span></font></div>
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<font face="Calibri,Helvetica,sans-serif,serif,EmojiFont" size="2"><span style="font-size: 16px;"><font face="Calibri,Helvetica,sans-serif,Helvetica,EmojiFont,Apple Color Emoji,Segoe UI Emoji,NotoColorEmoji,Segoe UI Symbol,Android Emoji,EmojiSymbols" size="2"><span style="font-size: 16px;"><i>Institute
for Quantum Computing, University of Waterloo</i></span></font></span></font></div>
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<font face="Calibri,Helvetica,sans-serif,serif,EmojiFont" size="2"><span style="font-size: 16px;"><font face="Calibri,Helvetica,sans-serif,Helvetica,EmojiFont,Apple Color Emoji,Segoe UI Emoji,NotoColorEmoji,Segoe UI Symbol,Android Emoji,EmojiSymbols" size="2"><span style="font-size: 16px;"><i>Email: </i></span></font><font face="Calibri,Helvetica,sans-serif,Helvetica,EmojiFont,Apple Color Emoji,Segoe UI Emoji,NotoColorEmoji,Segoe UI Symbol,Android Emoji,EmojiSymbols" size="2"><span style="font-size: 16px;"><font face="Calibri,Helvetica,sans-serif,Helvetica,EmojiFont,Apple Color Emoji,Segoe UI Emoji,NotoColorEmoji,Segoe UI Symbol,Android Emoji,EmojiSymbols" size="2"><span style="font-size: 16px;"><i><a href="mailto:saba.sadeghi@uwaterloo.ca" target="_blank" rel="noopener noreferrer">saba.sadeghi@uwaterloo.ca</a></i></span></font></span></font></span></font></div>
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