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<p class="MsoNormal">Hello Dr. Michael Khbeis and Bob Henderson;<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We can usually control undercutting (footing) at a stop layer and/or provide endpoint on a stop layer. However, not knowing the stop layer material or the system you are using it is difficult to advise further. If you are using a legacy
system this may or may not be possible.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Can you give Steve and I more information on the etch process? Depths, feature sizes, stop layer material? Also what model of DRIE system from SPTS is it?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><o:p> </o:p></b></p>
<p class="MsoNormal"><b>From:</b> <a href="mailto:mtkhbeis@gmail.com"><span style="color:blue">mtkhbeis@gmail.com</span></a> <<a href="mailto:mtkhbeis@gmail.com"><span style="color:blue">mtkhbeis@gmail.com</span></a>>
<br>
<b>Sent:</b> Thursday, February 27, 2020 10:42 PM<br>
<b>To:</b> Mick Krieg <<a href="mailto:Mick.Krieg@spts.com"><span style="color:blue">Mick.Krieg@spts.com</span></a>><br>
<b>Subject:</b> Fwd: [labnetwork] SPTS DRIE Question<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt">FYI <o:p></o:p></p>
<p class="MsoNormal">Dr. Michael Khbeis<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt">(C) <a href="tel:443.254.5192"><span style="color:blue">443.254.5192</span></a><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><br>
Begin forwarded message:<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span style="background:yellow;mso-highlight:yellow">From:</span></b><span style="background:yellow;mso-highlight:yellow">
<a href="mailto:bob.henderson@etchedintimeinc.com"><span style="color:blue">bob.henderson@etchedintimeinc.com</span></a><br>
<b>Date:</b> February 27, 2020 at 1:05:26 PM PST<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu"><span style="color:blue">labnetwork@mtl.mit.edu</span></a><br>
<b>Subject:</b> <b>[labnetwork] SPTS DRIE Question</b><o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow">I know a number of you have SPTS DRIE systems and I would like to ask what hardware configuration is necessary to prevent undercut (Footing) at the sacrificial stop layer at completion
of etch. I have been told that it requires a different frequency generator than 13.56 MHz used for the bulk etch. Do the newer tools also have some method of endpoint on the stop layer or is it just a timed etch? Your help is appreciated<o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow">Bob Henderson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow">Etched In Time, Inc<o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow">941 S. Park Lane<o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow">Tempe, Arizona 85281<o:p></o:p></span></p>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow">Phone: 602-206-6154</span><o:p></o:p></p>
<p class="MsoNormal">_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu"><span style="color:blue">labnetwork@mtl.mit.edu</span></a><br>
<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork"><span style="color:blue">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
<p class="MsoNormal"><span lang="EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal" style="line-height:16.0pt;mso-line-height-rule:exactly"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00386A">Greg Hollingshead, Southwestern Regional Sales Manager<o:p></o:p></span></b></p>
<p class="MsoNormal" style="line-height:16.0pt;mso-line-height-rule:exactly"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00386A">SPTS Technologies Ltd, A KLA Company<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:16.0pt;mso-line-height-rule:exactly"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00386A">M.</span><span lang="EN-GB" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00386A"> +1 (</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#00386A">972)
342 9722 (Austin TX) spts.com<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB"><o:p> </o:p></span></p>
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